Nec Electronics Corporation

Via Mechanics, Ltd.

Masanori Sato

Kenji Kimura

Atsushi Sakamoto

Kazuo Watanabe

Kazuya Matsumoto

Masaru Kikuchi

Mitsuru Kato

A laser processing apparatus disclosed in the present application includes: an optical deflection unit capable of changing a deflection direction of and outgoing energy of an incoming laser pulse by changes of a frequency of and an amplitude of a driving signal to be supplied; and a control unit configured to supply driving signals with amplitudes corresponding to respective frequencies. In a laser processing apparatus configured to process a workpiece by leading outgoing laser pulse of the optical deflection unit to the workpiece and irradiating the workpiece with the laser pulse, as the amplitude corresponding to each of the frequencies, the control unit supplies an amplitude having the ratio that is close to the lowest ratio among ratios of the outgoing energy with respect to the incoming energy of the laser pulse at an amplitude having the largest outgoing energy of the optical deflection unit.

Laser processing apparatus and laser processing method

Disclosed is a signal output circuit comprising: a first transistor of an emitter follower configuration, which receives an input signal; a second transistor of an emitter follower configuration, which receives the input signal, and has an output connected to an external load (); a comparator circuit which has an input pair connected via resistors to emitters of the first and the second transistors; a first current mirror circuit which has an input connected to an output of a first current source transistor and an output connected to an emitter of the first transistor; and a second current mirror circuit which has an input connected to a connection node of an output of a second current source transistor and an output of the comparator circuit, and has an output connected to an emitter of the second transistor.

Signal output circuit

Growing community of inventors

Kanagawa, Japan

Masanori Sato