Tokyo Electron Limited

Masanori Saito

Noriaki Kanaya

Yasuhiro Tsuruma

Hiroshi Ogino

A reception unit receives a processing instruction including a recipe. A calculation unit calculates an identifier from the recipe received by the receiving unit. A determination unit determines whether an identical identifier to the calculated identifier is stored in a memory. A control unit controls a substrate processing apparatus using an operation data item associated with the identical identifier and the recipe received by the receiving unit when the determination unit determines that the identical identifier is stored in the memory.

Growing community of inventors

Sapporo, Japan

Masanori Saito