Denso Corporation

Toyota Jidosha Kabushiki Kaisha

Masanobu Azukawa

Tetsuo Fujii

Takeshi Ito

Tameharu Ohta

Itaru Ishii

Hiroshi Tanaka

Yuta Hasebe

Kenta Iwahana

Junichi Tanaka

Tadashi Kobayashi

A physical quantity sensor includes a sensor portion, a casing, and a vibration isolator. The casing includes a supporting portion with a supporting surface that is located to face an end surface of the sensor portion. The vibration isolator is located between the end surface of the sensor portion and the supporting surface of the casing to join the sensor portion to the casing. The vibration isolator reduces a relative vibration between the sensor portion and the casing.

Physical quantity sensor and method of making the same

Physical quantity sensor

A vibration device separates foreign particles from a semiconductor device, and a suction interface of a suction device covers an opening portion of the semiconductor device. A space connected with a vacuum passage and a communication passage is formed between the semiconductor device and the suction interface. The suction device suctions the space, and fresh air is introduced into the space through the communication passage. As a result, a current of air is generated from the communication passage to the vacuum passage, and foreign particles are suctioned and removed from the space.

System and method for removing foreign particles from semiconductor device

Method of making a physical quantity sensor

Growing community of inventors

Anjo, Japan

Masanobu Azukawa