Hitachi, Ltd.

Masanari Kouguchi

Mikio Ichihashi

Yoshifumi Taniguchi

A method and apparatus for measuring the physical properties of a micro region measures the two-dimensional distribution of stress/strain in real time at high resolution and sensitivity and with a high level of measuring position matching. A sample is scanned and irradiated with a finely focused electron beam (), and the displacement of position of a diffraction spot () is measured by a two-dimensional position-sensitive electron detector (). The displacement amount is outputted as a voltage value that is then converted into the magnitude of the stress/strain according to the principle of a nano diffraction method, and the magnitude is displayed in synchronism with a sample position signal.

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Kunitachi, Japan

Masanari Kouguchi