Fujikin Inc.

Masamori Tsukada

Izuru Shikata

Mutsunori Koyomogi

Megumu Makino

Jubee Aizawa

A pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus () includes a first passage block () in which a predetermined passage () is formed, a second passage block () in which a predetermined passage () is formed and which opposes to the first passage block () at a predetermined interval, and a pressure sensor () which is provided in an opposing surface of any one of the first and second passage blocks () and detects a fluid pressure in an inner passage (), and is integrated in a pressure regulator ().

Growing community of inventors

Tokyo, Japan

Masamori Tsukada