Hitachi, Ltd.

Hitachi Vlsi Engineering Corp.

Masamitsu Yazawa

Hidetoshi Matsumoto

Kenji Hiruma

Yasunari Umemoto

Kensuke Ogawa

Toshio Katsuyama

Masanari Koguchi

Hiroshi Kakibayashi

Shigeo Goto

Yoko Uchida

Gerard P Morgan

Nobutaka Futigami

A semiconductor device (e.g., hetero-junction field-effect transistor) which has decreased capacitance between the gate and drain, and which has decreased source resistance, is provided. Structure in which a contact layer 6 comes in contact with the side surfaces of a channel layer 3 but does not come in contact with the side surfaces of a barrier layer 4 enables capacitance between the gate and drain to be decreased. This capacitance can be decreased down to 1.5 pF per 10 .mu.m of the width.

Semiconductor device having first and second stacked semiconductor

A field effect transistor and a ballistic transistor using semiconductor whiskers each having a desired diameter and formed at s desired location, a semiconductor vacuum microelectronic device using the same as electron emitting materials, a light emitting device using the same as quantum wires and the like are disclosed.

Semiconductor device using whiskers

A field-effect transistor or a bipolar transistor may be provided in which the contact resistance between a channel layer or base layer and a contact layer are reduced. For example, an InGaAs buffer layer may be formed on the substrate side of an InGaAs channel layer of a field-effect transistor and by the bypassing effect that carriers pass through this InGaAs buffer layer, the InGaAs channel layer comes in contact with the contact layer with a low resistance. The contact resistance between the InGaAs channel layer and the contact layer can be reduced to 10 ohm per a width of 10.mu.m, and as a result, the value of transconductance factor K of a field-effect transistor can be increased in 14 mA/V.sup.2 per a width of 10.mu.m.

Semiconductor device having reduced contact resistance between a channel

Growing community of inventors

Yokohama, Japan

Masamitsu Yazawa