Canon Kabushiki Kaisha

Masamichi Ueno

Shingo Amano

Isamu Okuma

A vibration damping apparatus configured to damp a vibration of a target member includes a mass body, a base disposed on the target member, a support member disposed on the base and configured to support the mass body, a housing disposed on the base so as to surround the support member, an elastic member disposed so as to form a space in the housing and configured to apply a force to the support member, and a control unit configured to control a pressure of a fluid in the space by supplying the fluid to the space based on a vibration state of the target member.

Vibration damping apparatus, reaction force processing system, stage apparatus, exposure apparatus, substrate processing device, and method for manufacturing article

A robot hand is provided and includes a robot hand control unit that has at least three gripping fingers on a base and controls the robot hand, a plurality of drive mechanisms that brings the three gripping fingers independently close to or separate from each other, a plurality of drive control units that individually controls each of a plurality of drive sources of the plurality of drive mechanisms, and a distribution control unit that is disposed on the base and distributes an instruction value from the robot hand control unit to the plurality of drive control units associated with the plurality of gripping fingers. At least one of the gripping fingers includes an integrally formed drive source and drive control unit.

Robot hand and control method for the robot hand

A method of controlling a holding apparatus configured to hold plural kinds of target objects by plural fingers in plural relative postures includes calculating, on a basis of information about holding force of the fingers in a relative posture for a target object, an amount of positional deviation of the target object held by the fingers, and correcting, on a basis of the amount of positional deviation calculated in the calculating, a position of the target object held by the fingers.

Method of controlling holding apparatus, holding apparatus, and robot apparatus

A force sensor includes a pedestal member, an action member, a displacement detecting unit, a ridged member, at least three columnar elastic members, and elastic units. The action member is configured to be displaced by an exerted external force, and the displacement detecting unit detects a displacement of the action member. The rigid member is arranged so as to face the pedestal member. The columnar elastic members extend in a direction perpendicular to the pedestal member, are arranged about an axis at intervals, and connect the pedestal member and the rigid member. The elastic units are arranged about the axis at intervals and connect the action member and the rigid member. The elastic units each include a pair of beam-shaped elastic members extending in a direction parallel to a plane of the pedestal member.

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Kawasaki, Japan

Masamichi Ueno