Ebara Corporation

Masamichi Nakashiba

Norio Kimura

Isamu Watanabe

Kaori Yoshida

Yoko Hasegawa

Takahiro Oshita

Shuichi Nagato

Tetsuhisa Hirose

Norihisa Miyoshi

A polishing apparatus for polishing a workpiece such as a semiconductor wafer has a turntable with a polishing surface, and a top ring for holding a workpiece and pressing the workpiece against the polishing surface under a first pressing. The polishing apparatus has a pressurized fluid source for supplying pressurized fluid, and a plurality of openings provided in the holding surface of the top ring for ejecting the pressurized fluid supplied from the pressurized fluid source. A plurality of areas each having the openings are defined on the holding surface so that the pressurized fluid is selectively ejectable from the openings in the respective areas.

Apparatus for and method for polishing workpiece

Combustibles such as wastes are gasified in a fluidized bed. A fluidized-bed furnace has a heat recovery region in addition to a combustion region. The temperature of a fluidized bed or the temperature of a freeboard is controlled so as to be kept at a predetermined value by adjusting the heat recovery rate in the heat recovery region.

Method and apparatus for gasifying fluidized bed

A polishing apparatus for polishing a workpiece such as a semiconductor wafer has a turntable with an abrasive cloth mounted on an upper surface thereof, and a top ring for holding a workpiece and pressing the workpiece against the abrasive cloth under a first pressing force to polish the workpiece. The top ring has a recess defined therein for accommodating the workpiece therein. A presser ring is vertically movably disposed around the top ring, and pressed against the abrasive cloth under a variable second pressing force. The first and second pressing forces are variable independently of each other, and the second pressing force is determined based on the first pressing force.

Apparatus for polishing workpiece

Apparatus for and method of polishing workpiece

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Tokyo, Japan

Masamichi Nakashiba