Fuji Photo Optical Co., Ltd.

Masami Yoneda

Kenji Yasuda

Takayuki Saito

Toshikazu Akaogi

Shigenori Ohi

Kenichi Noguchi

Yutaka Ohashi

Tomimaro Kitaura

A method for interference fringe analysis in which a subject surface is located in parallel to a reference surface and multiply step shifted a specific distance for each step to derive data and images of interference fringes for determining aspects of the geometry of the subject surface.

Method of interference fringe analysis for determining aspect of surface

An alignment verification system for adjusting the posture of a test piece on a support table into alignment with a reference plate on an interferometer containing a light source to irradiate the test piece and reference plate, the verification system including: a bi-axial adjustment means for tilting the support table in the directions of perpendicularly intersecting X- and Y-axis; spot image forming means arranged to converge light reflections from a master surface of the reference plate and an inspecting surface of the test piece into spot images of a predetermined diameter at a predetermined spot image-forming plane; a line sensor located at the spot image-forming plane across the spot image of the reference plate and having a linear light receiving face switchable through 90.degree. between an X-axis position and a Y-axis position corresponding to the directions of the X- and Y-axes of the bi-axial adjustment means, for detecting the spot image of the test piece in relation with tilting adjustments of the support table by the bi-axial adjustment mechanism in each of the X- and Y-axis positions; and a sensor drive mechanism adapted to switch the light receiving face of the line sensor from the X-axis position to the Y-axis position or vice versa upon detecting the spot image of the test piece in one of the X- and Y-axis positions.

Alignment verification system for use with interferometer and having a

Disclosed herein is an interferometric surface inspection machine which is arranged to facilitate the inspection of finished spherical lens surfaces, and which essentially includes: a surface plate formed with a through light guide opening in a predetermined position; an up-down guide means suspended from the lower side of the surface plate; an interferometer liftably supported on the up-down guide means and having a reference lens with a reference surface thereof disposed on the side of the light guide opening and in face to face relation with said light guide opening; and a lens mount portion adjustably located in a predetermined position above the light guide opening in the surface plate and adapted to support peripheral edge portions of a spherical lens element on the side of the lens surface to be inspected.

Interferometric surface inspection machine designed to support an

A beam shifting device for directing a beam toward a fixed point of an object has instance vertical and horizontal beam shift elements, such as transparent optical plates with parallel surfaces positioned in an intended optical path. The vertical beam shift parallel plate is able to turn about a horizontal axis perpendicular to the optical axis for vertically shifting the beam upward and downward. The horizontal beam shift parallel plate, positioned in parallel with the vertical beam shift parallel plate, is able to turn about a vertical axis perpendicular to the optical axis for horizontally shifting the beam left and right. A controller detects vertical and horizontal deviations of the beam based on a distribution pattern of relative luminous energy of the beam diverged onto a spatial plane perpendicular to the intended path and drives the vertical and horizontal beam shift parallel plates to cancel the vertical and horizontal deviations of the beam, respectively.

Beam shifting device

A laser apparatus includes two sets of pumping arrangements for providing pumping energy for a laser medium used in common, each comprising a reflector with a reflective surface which defines an elliptical cavity and a pumping source located along a focal line of the ellipse formed by the elliptical cavity. One pumping arrangement is usually used and the other is held in reserve as a spare. When the former is out of order, the latter is automatically made available.

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Omiya, Japan

Masami Yoneda