Sandisk Technologies Inc.

Masami Uozaki

Yuji Takahashi

Takuya Futase

Kiyokazu Shishido

Noritaka Fukuo

Katsuo Yamada

Shunsuke Watanabe

A wide trench having a width Wand narrow trenches having a width Wthat is less than Ware formed in a dielectric layer, the wide trench extending deeper in outer regions than in a central region. A trench modification step changes the width of the wide trench and reduces a depth difference between the outer regions and the central region of the wide trench.

Metal line with increased inter-metal breakdown voltage

A first depression and a second depression are formed in an upper surface of a first metal layer. A dielectric layer is formed over the first metal layer. Subsequently, a wide trench is formed in the dielectric layer, the wide trench extending deeper in a first outer region and in a second outer region than in a central region located between the first outer region and the second outer region, the first outer region overlying the first depression and the second outer region overlying the second depression.

Metal indentation to increase inter-metal breakdown voltage

Growing community of inventors

Yokkaichi, Japan

Masami Uozaki