Sumco Corporation

Japan Super Quartz Corporation

Masami Ohara

Toshiaki Sudo

Ken Kitahara

Tadahiro Sato

Hiroshi Kishi

Eriko Kitahara

Masaru Sato

A quartz glass crucible () has a structure wherein a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface () of the crucible is present at a position deeper than the inner surface (). In an exemplary embodiment, the quartz glass crucible is capable of improving the yield of a silicon single crystal by suppressing peeling-off of brown rings.

Quartz glass crucible and manufacturing method thereof

A quality-evaluated vitreous silica crucible for pulling silicon single crystal is provided, wherein an inner surface of the vitreous silica crucible has regions where surface defects including brown rings are to be generated when pulling silicon single crystal. The regions are distinguished using an infrared absorption spectrum or a Raman shift of the regions, wherein a position of each region and/or a density of the regions are/is specified.

Quality-evaluated vitreous silica crucible

A method of manufacturing a vitreous silica crucible includes an inspection method comprising: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether a surface defect region is generated or not in the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.

Inspection method of vitreous silica crucible

An inspection method of vitreous silica crucibles includes: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether or not a surface-defect region occurs at the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.

A closure for silica glass crucible to be mounted on an opening portion of a silica glass crucible is provided with a peripheral edge mounting portion closely adhered to an inner peripheral end of the opening portion.

Growing community of inventors

Akita, Japan

Masami Ohara