Agency of Industrial Science and Technology Ministry of International

Masami Ishii

Yoshinobu Sugiyama

Tadashi Nakagawa

Taro Itatani

Kazuhiko Matsumoto

A high-speed, high-sensitivity photo-receiving device has a light-absorbing substrate, on which a pair of electrodes are provided. An insulative optical guide is located over an exposed surface portion of the substrate constituting an optical window. The optical guide is permeable to incident light, and the width of the optical guide does not exceed the wavelength of the incident light.

Photo-receiving device with light guide

A method of fabricating a photo-device includes the steps of forming an optically nontransparent, electrically conductive layer on the surface of a photoelectric conversion substrate, and transferring a portion of the optically nontransparent, electrically conductive layer using a scanning probe process apparatus to form, over an optical window, a light-permeable protective insulation structure of a region of the optical window on the substrate surface beneath the light-permeable protective insulation structure.

Growing community of inventors

Tsukuba, Japan

Masami Ishii