Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mitsubishi Heavy Industries Limited (1 from 4,618 patents)
1 patent:
1. 7755777 - Wavelength selection method, film thickness measurement method, film thickness measurement apparatus, and system for producing thin film silicon device