Hitachi, Ltd.

Hitachi-High-Technologies Corporation

Hitachi High-Tech Instruments Company, Ltd.

Masami Iizuka

Hiroyuki Shinada

Atsuko Takafuji

Yasuhiro Gunji

Kouichi Hayakawa

Masayoshi Takeda

Hiroshi Goto

Masahiro Watanabe

Shigeru Matsui

Takayuki Ono

Kazuyoshi Oyama

Tadashi Suzuki

Hisayoshi Kashitani

Koichi Izuhara

Yutaka Mitsumochi

Yoshihiro Onoguchi

Hiroomi Kobayashi

The invention is directed to an electronic component mounting apparatus which is applicable to a case in which component feeding devices need not be provided on both sides of a carrying device respectively for reasons of types of electronic components or a setting space and increases an operating rate of a beam to enhance production efficiency. An electronic component mounting apparatus has a carrying device carrying a printed board, a component feeding device supplying electronic components, a pair of beams movable in one direction by drive sources, and mounting heads each having suction nozzles and movable along the beams by drive sources. The component feeding device is provided on only one side of the carrying device, and the suction nozzles provided on each of the mounting heads pick up electronic components from the component feeding device and mount the electronic components on a printed board by moving the mounting heads provided on both the beams between the printed board on the carrying device and the component feeding device by driving the drive sources respectively.

Electronic component mounting apparatus

A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam deflection mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam deflection mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

Lighting optical machine and defect inspection system

According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.

Charged particle beam apparatus and automatic astigmatism adjustment method

A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam polarization mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam polarization mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.

Growing community of inventors

Ishioka, Japan

Masami Iizuka