Matsushita Electric Industrial Co., Ltd.

Panasonic Intellectual Property Management Co., Ltd.

Masako Yamaguchi

Koji Nomura

Kazunari Nishihara

Yukinori Sasaki

Tetsuro Shimamura

Kiyotomo Kubota

Hirohumi Tajika

Takeshi Mori

Hiroshi Nakatsuka

Keisuke Kuroda

Hideki Ueda

Hitoshi Yoshida

Kazuhiro Onaka

Kazuo Goda

Takanori Aoyagi

Kouji Nabetani

Yuki Maegawa

Takuya Kajiwara

Takahiro Shinohara

Rie Okamoto

Nobukazu Hayashi

Yukio Nakao

Masataka Tagawa

A connection assembly includes a sensor substrate, a layer substrate coupled to the sensor substrate so as to face an upper surface of the sensor substrate, and a wire connected between the sensor substrate and the layer substrate. The sensor substrate includes first and second projections provide on the upper surface of the sensor substrate and extending in an extension direction along the upper surface of the sensor substrate. The wire has a first end sandwiched between the layer substrate and the first projection, and a second end sandwiched between the layer substrate and the second projection. The connection assembly provides reliable connection.

Connection assembly

A magnetic bias filmincludes a magnetic bias magnetthat has magnetic layers and generates a magnetic field within a plane perpendicular to a lamination direction of the magnetic layers, which is manufactured in the shape of substantially a rectangular prism having a long side, a short side, and a thickness (in the lamination direction) in order of decreasing lengths. A ratio of the long side with respect to the short side of the magnetic bias magnetin length is in a range of 5 to 200.

Magnetic bias film and magnetic sensor using the same

A method for manufacturing a bimorph type piezoelectric element including a first step of providing a first piezoelectric single-crystal plate having a first surface and a second surface; a second step of providing a second piezoelectric single-crystal plate having a third surface and a fourth surface; a third step of directly bonding the third surface of the second piezoelectric single-crystal plate to the first surface of the first piezoelectric single-crystal plate without using any adhesives; a fourth step of forming a freely vibrating part by grinding away the second surface of the first piezoelectric single-crystal plate to a first depth and with a first spacing; and a fifth step of producing an element having a supporting member and the freely vibrating part by cutting the first piezoelectric single-crystal plate and second piezoelectric single-crystal plate with the freely vibrating part included, which have been prepared in the fourth step, with a predetermined spacing and at least in one of the directions of rows and columns.

Method for manufacturing a bimorph piezoelectric device for acceleration sensor

The present invention relates to a bimorph type piezoelectric acceleration sensor used in detecting vibrations of a variety of equipment such as a hard disk, CD-ROM and the like and has the objective of providing a bimorph type piezoelectric element for acceleration sensor of a small size, high sensitivity, a narrow range of sensitivity variation and a low cost by forming a freely vibrating part and a supporting means at the same time in single-piece construction through a grinding away process applied to lithium niobate. One section of a structure formed of two of a lithium niobate single-crystal plate directly bonded together with the polarization directions thereof reversed each other is applied with a grinding away process to produce a freely vibrating part (,) and the remaining section, where no grinding away process has been applied, serves as a supporting member (,), thus both being formed simultaneously and made integral with each other, and electrodes (,) are formed by electroless plating.

Bimorph piezoelectric device for acceleration sensor and method of its manufacture

Growing community of inventors

Osaka, Japan

Masako Yamaguchi