Central Glass Company, Limited

Masakiyo Nagatomo

Akifumi Yao

Akiou Kikuchi

Yuta Takeda

Shinya Ikeda

A production method of tungsten hexafluoride according to one embodiment of the present invention includes: a first step of bringing tungsten having an oxide film into contact with a fluorine gas or inert gas containing 50 vol ppm to 50 vol % of hydrogen fluoride in a reactor, thereby removing the oxide film from the tungsten; and a second step of bringing the tungsten from which the oxide film has been removed by the first step into contact with a fluorine-containing gas to form tungsten hexafluoride.

Method for producing tungsten hexafluoride

The method for producing a filled container of the present invention includes: providing a metal storage container, at least an inner surface of which is formed of a manganese steel and in which the inner surface has a surface roughness Rof 10 &#x3bc;m or less; performing fluorination by bringing the inner surface of the storage container into contact with a gas containing at least one first fluorine-containing gas selected from the group consisting of ClF, IF, BrF, F, and WFat 50&#xb0; C. or lower; purging the inside of the storage container with an inert gas; and filling the inside of the storage container with at least one second fluorine-containing gas selected from the group consisting of ClF, IF, BrF, F, and WF.

Method for manufacturing filled container, and filled container

A treatment method according to the present invention includes bringing a metal oxyfluoride of the general formula: MOF(where 0&#x3c;x&#x3c;6; and M=W or Mo) into contact with a fluorine-containing gas at a reaction temperature higher than or equal to 0&#xb0; C. and lower than 400&#xb0; C., thereby converting the metal oxyfluoride to a metal hexafluoride of the general formula: MF(where M=W or Mo). This treatment method enables conversion of the metal oxyfluoride to the high vapor pressure compound without the use of a plasma generator and can be applied to cleaning of a metal fluoride production apparatus or cleaning of a film forming apparatus.

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Ube, Japan

Masakiyo Nagatomo