Jeol Ltd.

National Institute of Advanced Industrial Science and Technology

Masaki Takeguchi

Toshikatsu Kaneyama

Takeshi Tomita

Toshikazu Honda

Hiromi Nunome

Kazuhiro Yoshihara

Kazuo Furuya

A holography electron microscope permitting electron holography without limitations on the magnification. An electron biprism is mounted between a system of intermediate lenses and a system of projector lenses. The objective lens and the system of intermediate lenses form a crossover at a given position between intermediate lenses and the electron biprism and, at the same time, focus a magnified image at a certain position between the electron biprism and projector lenses. Since the system of intermediate lenses is made up of three or more stages of lenses, it forms a crossover at a given position and focuses a magnified image at a certain position.

Holography transmission electron microscope

Si nanocrystals are formed by irradiating SiO substrates with electron beams at a temperature of 400&deg; C. or higher, thereby causing electron-stimulated decomposition reaction. As a result of the said reaction, single crystalline Si nanostructures are fabricated on the SiO substrate with good size and positional controllability.

Fabrication method of Si nanocrystals

There is disclosed an electron-beam biprism for use in an electron-beam holographic interference microscope. The biprism comprises a rotary plate having a hole permitting passage of an electron beam, a biprism wire mounted to the rotary plate and electrically insulated from the rotary plate, a holder, a rotating mechanism, a heating mechanism for heating the biprism wire, a voltage source for applying a voltage to the biprism wire, and a pair of grounding electrodes extending parallel to the biprism wire which bridges across the hole. The rotary plate is rotatably held by the holder so as to be rotatable about the hole. The grounding electrodes are mounted to the rotary plate. The biprism wire is sandwiched between the grounding electrodes.

Electron-beam biprism

Growing community of inventors

Ibaraki, Japan

Masaki Takeguchi