Nissan Motor Company Limited

Gigaphoton Inc.

Canon Kabushiki Kaisha

Nec Corporation

Hitachi, Ltd.

Komatsu Corporation

Kabushiki Kaisha Toshiba

Jatco Corporation

Nsk Corporation

Renault S.a.s.

Xanavi Informatics Corporation

Renault S.a.s. Societe Par Actions Simplifiee

Gigphoton Inc.

Nissan Mvtor Co., Ltd.

Masaki Nakano

Hiroyuki Hirano

Toshikazu Oshidari

Haruyoshi Kumura

Minoru Arimitsu

Toshiaki Iwanaga

Sigeaki Yamamuro

Keiju Abo

Toshifumi Hibi

Yuusuke Minagawa

Hirofumi Shimizu

Haruhito Mori

Yutaka Kashihara

Masatsugu Ogawa

Shinichi Takata

Naoyuki Ohki

Yasuo Fukazu

Kazuki Miyamoto

Takahiro Ushiro

Keyvan Kargar

Atsushi Chaki

Hisayuki Furuse

Osamu Wakabayashi

Takashi Kato

Hiromi Honma

Kazuhiro Ohyoshi

Akira Endo

Yuji Nagai

Akihito Ogawa

Takayuki Yabu

Shuichi Ohkubo

Kenta Suzuki

Takanobu Ishihara

Yasuhiro Yamauchi

Fumio Iwamoto

Yves Pichon

Hiroshi Fukushima

Katsuya Kobayashi

Shinichiro Kawasaki

Shinkichi Tanimizu

Takeo Yoshida

Kazuhiro Yamada

Hajime Yamamoto

Kenji Inoue

Masato Moriya

Naoki Morishita

Shigeo Yamagata

Yasuo Takagi

Yoichi Yamagishi

Yoshifumi Ueno

Yutaka Yano

Hiroyuki Kimura

Hisashi Machida

Hiroyuki Ogino

Tatsuya Yanagida

Tsukasa Hori

Koji Doi

Eiichi Matsuzaki

Takashi Tsunoda

Hiromasa Sakai

Masaki Okada

Hideaki Yui

Hideharu Yamamoto

Tomoya Imazu

Kensuke Sasaki

Yutaka Shiraishi

Kenichiro Ono

Yasushi Narita

Jun Sugihara

Motoharu Nishio

Teruki Suzuki

Mitsuya Okada

Hiroshi Komori

Makoto Ogawa

Naoto Yamamoto

Hideo Sano

Masashi Kubota

Shigeru Sugita

Yoshiaki Morimoto

Jun Maeoka

Kenichi Nomura

Koki Kuroda

Makoto Uehara

Kan Akatsu

Mitsuru Amimoto

Takayuki Watanabe

Toshikatsu Manabe

Masahiro Kosaka

Hitoshi Nagano

Akira Ioku

Satoshi Sugaya

Tatsuya Nagato

Hiroaki Kuramoto

Eitaro Misumi

Tadashi Matsuoka

Hideki Tanabe

Jun Muramatsu

Eio Sagara

Masayuki Nagai

Tsuyoshi Kano

An extreme ultraviolet light generation apparatus includes a droplet target generation device and a solid target replenishment device. The droplet target generation device includes a tank configured to melt a solid target substance to generate a liquid target substance, and a nozzle configured to continuously generate a droplet target from the liquid target substance in the tank and output the droplet target toward a plasma generation region to which pulse laser light is concentrated, and is configured to apply a velocity difference between a plurality of droplet targets including the droplet target so that the plurality of droplet targets coalesce. The solid target replenishment device is configured to replenish the tank with a one-time replenishment amount of the solid target substance such that the coalescence of the plurality of droplet targets is completed before the plurality of droplet targets reach the plasma generation region.

Extreme ultraviolet light generation apparatus and electronic device manufacturing method

A target supply device is configured to supply a liquid state target substance including tin to a concentration position of laser light to generate EUV light. The target supply device includes a tank configured to contain the target substance; and a nozzle communicating with an inside of the tank, and having a nozzle hole through which the target substance passes. Here, an uneven structure is formed on a surface of the nozzle provided with the nozzle hole and facing the concentration position and exhibits tin repellency larger than tin repellency exhibited by a material of the surface.

Target supply device and electronic device manufacturing method

In order to facilitate fixed-point monitoring over a wide area and for a long time, this water area monitoring device comprises: a detection unit for information, such as water area intrusion, which detects, from sound data that is acquired by means of optical fibers installed in the water or the water bottom and is data pertaining to a sound or a vibration at the respective positions of the optical fibers, at least any one among sounds of water area intrusion or the like that indicate intrusion into a target water area or water area intrusion or the like, which is a prescribed behavior in the target water area, at a time at which sound data is acquired, and changes in sounds or vibrations not caused by the water area intrusion or the like; and an output unit which outputs information indicating the sound such as water area intrusion.

Water area monitoring device, water area monitoring system, water area monitoring method, and recording medium

A target supply device according to an aspect of the present disclosure includes a tank in which a target substance in a liquid form is housed, a vibration element configured to generate a droplet of the target substance by providing, through a vibration propagation path, vibration to the target substance output through the nozzle, a first temperature adjustment mechanism configured to adjust a temperature of a refrigerant to be supplied to the vibration propagation path component to a first temperature, a temperature sensor configured to detect a temperature of the vibration propagation path, a second temperature adjustment mechanism configured to adjust, to a second temperature, the temperature of the vibration propagation path to which the refrigerant is supplied, and a control unit configured to control the second temperature adjustment mechanism based on an output from the temperature sensor.

Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

A target supply device according to an aspect of the present disclosure includes a nozzle through which a liquid target substance is output, and a vibration unit configured to vibrate the target substance supplied to the nozzle, and the vibration unit includes a vibration element configured to vibrate in accordance with applied drive voltage from outside, a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle, a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle, and a load adjustment device configured to adjust the pressing load in accordance with a signal from outside.

A target supply device includes a vibrating element driven by a square wave electric signal and configured to generate a droplet of a target substance by vibrating the target substance to be output from a nozzle through a vibration propagating path; a temperature adjusting mechanism configured to adjust, to a specified temperature, a temperature of a vibration propagating path member including at least part of the vibration propagating path; a droplet detecting unit configured to output a signal containing information on a droplet detection interval indicating a time interval of droplets continuously generated; and a control unit configured to determine, based on the droplet detection interval, an operation specified temperature that is the specified temperature of the vibration propagating path member and an operation duty value that is a duty value of the electric signal used for driving the vibrating element when the droplet is irradiated with the laser beam.

Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method

An extreme ultraviolet light generation device includes: a target supply unit including a nozzle through which a target substance in a liquid form is output into a chamber; a piezoelectric element configured to vibrate the nozzle under a droplet connection condition to regularly generate a droplet of the target substance; and a control unit configured to perform search processing of changing a drive condition of the piezoelectric element to search for a drive condition of the piezoelectric element corresponding to the droplet connection condition and configured to set a drive condition of the piezoelectric element used for generation of extreme ultraviolet light based on a result of the search processing. The control unit preliminarily drives the piezoelectric element before performing the search processing and starts the search processing after performing the preliminary drive.

Extreme ultraviolet light generation device and target supply device

A target supply apparatus according to one aspect of the present disclosure includes a nozzle configured to output a target, a plurality of vibrators including a first vibrator configured to vibrate the nozzle, a detection unit configured to detect a change in state of the target having been output from the nozzle, a vibrator switching unit configured to perform switching of a vibrator that vibrates the nozzle from the first vibrator to the other vibrator that is included in the vibrators and is different from the first vibrator, and a control unit configured to control the switching of the vibrator that vibrates the nozzle, based on the change in state of the target having been output from the nozzle, detected by the detection unit.

Target supply apparatus

An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of equal to or smaller than 90 degrees with the target.

Extreme ultraviolet light generation apparatus

A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal.

Target generation device and extreme ultraviolet light generation apparatus

A terminal allows immediate receipt of notification, while holding down the load on a management control device. The terminal has a timer value storage for storing a timer value, a counter for counting the cycle indicated by the timer value, a connection request part for transmitting a connection request to the management control device every time when the counting is finished, an event detector for detecting an event, and a timer value modifier for modifying the timer value to a value indicating a shorter cycle, upon occurrence of the event. The connection request part further transmits the connection request to the management control device, upon occurrence of detecting the event, and the timer value modifier modifies the timer value a value indicating a longer cycle, upon receiving a message indicating that there is no processing request from the management control device.

Element terminal and communication system

Offset in the ejection direction of target material droplets is corrected in order to stabilize EUV output in an EUV light source device. An extreme ultraviolet light source device includes a droplet generation devicethat outputs target material dropletstowards a predetermined plasma emission point; a charging devicethat charges the target material droplets; a trajectory correction devicethat generates a force field in the trajectory to correct the travel direction of the charged target material dropletsso that the charged target material dropletstravel towards the plasma emission point; and a laser light sourcethat irradiates, at the plasma emission point, a laser beam onto the charged target material to generate plasma thereby.

Extreme ultraviolet light source device

Provided is a resource management method in a system which individually limits a resource amount used by a software module () and adjusts the total of the maximum resource amounts used by respective software modules to be smaller than the entire system resource amount. When installing or executing a new software module, stepchecks whether a software module group already installed or being executed is stably operating according to an execution history thereof; and stepchecks whether to enable the installation or execution by including the maximum actual resource use value in the total from the execution history.

Installing and executing new software module without exceeding system resource amount

An electric component structure is provided with at least two electrical conductive parts, an insulator and a magnetic flux generating structure. The electrical conductive parts are arranged with an electric line of force existing between adjacent ones of the conductive parts. The insulator holds the conductive parts. The magnetic flux generating structure generates a magnetic flux with magnetic flux lines oriented in a direction different from a direction of the electric line of force existing between the adjacent ones of the conductive parts.

Electrical component structure

Growing community of inventors

Yokohama, Japan

Masaki Nakano