Mitsubishi Denki Kabushiki Kaisha

Other

Toshiba Mitsubishi-Electric Industrial Systems Corporation

Mitsubishi Electric Corporation

Mitsubishi Denki K.k.

Masaki Kuzumoto

Shigenori Yagi

Youichiro Tabata

Noboru Wada

Koji Yasui

Kenji Yoshizawa

Koji Ohta

Makoto Miyamoto

Seiji Noda

Izumi Oya

Masaaki Tanaka

Yasuhiro Tanimura

Yujiro Okihara

Akaru Usui

Hirozoh Kanegae

Hiromichi Komiya

Yuji Ganryu

Junichi Nishimae

Hajime Nakatani

Yasutaka Inanaga

Takashi Yamamoto

Shuji Ogawa

Tatsuo Kataoka

Yushi Takenaka

Shigeki Nakayama

Junji Hirotsuji

Tateki Ozawa

Akihiro Otani

Masahiro Mukai

Junji Ochi

Masato Matsubara

Masashi Ohmori

Yasuhito Myoi

Kazuki Kuba

Hideo Ichimura

Hideo Horibe

Tetsuji Oishi

Masao Nozaki

Osamu Matsuoka

Satoshi Nishida

Yoichiro Tabata

Yutaka Mihashi

Toshitaka Aoyagi

Taichiro Tamida

Shigeki Maekawa

Masaharu Moriyasu

Toshiaki Yoshizumi

Norikazu Tabata

Yoshito Seiwa

Akio Masuda

Norimitsu Esaki

Shingo Mine

Hiroyuki Igehara

Kouji Ota

Tetuya Endo

An ozone generating apparatus is provided which includes a pair of electrodes for producing a discharge by the application of an ac voltage therebetween, and at least one dielectric provided between the pair of electrodes. A source gas containing oxygen is provided into a discharge space in which the discharge is produced to generate ozone by the action of the discharge. A surface lying between at least one of the pair of electrodes and the discharge space and in contact with the discharge has a surface resistivity of 10&#x3a9; to 10&#x3a9;. The source gas provided into the discharge space includes ultrapure oxygen having a purity of not less than 99.9%.

Ozone generating apparatus

A method of generating ozone by applying a silent discharge to oxygen as a first raw material gas, and an oxide compound gas, as a second raw material gas, in which excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, dissociates the oxide compound gas, or excites the oxide compound gas, accelerating dissociation of the oxygen and generation of ozone. In this way, ozone generation efficiency is raised.

Method of generating ozone

A photoresist film removing apparatus includes a reacting chamber, an ozonizer producing a gas supplied to the reacting chamber, and an exhaust system that exhausts the gas from the reacting chamber. A source of a photoresist film-remover is located opposite a stage carrying a substrate covered with photoresist. Photoresist film-remover and the gas are supplied to the substrate through apertures. An electric field may be generated between the source of the photoresist film-remover and the substrate. Alternatively, a centrally located feed tube supplies only one of the gas and the photoresist film-remover through a single aperture and a reservoir discharges the other through apertures. The reservoir surrounds and is sealed to the feed tube. The apparatus may include a container holding a liquid photoresist film-remover and a mixture of the gas and remover is supplied from outside the reacting chamber to the substrate.

Apparatus for removing photoresist film

A silent discharge plasma apparatus includes a dielectric member, a pair of electrodes opposed to each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing a discharge. A gas is supplied to a discharge space, where discharge occurs, and a plasma is produced. At least one of the electrodes includes a conductive power feeding thin film on the dielectric member. When the dielectric member is destroyed and an arc discharge develops between the electrodes, the power feeding thin film is eliminated or oxidized, and the arc discharge is stopped.

Silent discharge plasma apparatus

It is intended to provide a volatile organic compound treatment apparatus having: an absorption treatment chamber in which absorption frames having absorbents for absorbing volatile organic compounds are aligned in a direction of a gas flow; an absorbent recovery treatment chamber that is provided with a discharge unit having a high voltage electrode, a ground electrode, and a dielectric; and a transfer mechanism for transferring the absorption frames present in an upstream of the gas flow to the absorbent recovery treatment chamber and transferring the absorption frames in the absorbent recovery treatment chamber to a downstream of the gas flow. The volatile organic compound treatment apparatus is capable of decomposing VOC without generating a large amount of harmful NOx and reduced in apparatus cost.

Apparatus for volatile organic compound treatment and method of volatile organic compound treatment

An ozonizer has a flat plate-shaped low voltage electrodea flat plate-shaped high voltage electrodefacing a main surface of the low voltage electrodeThe ozonizer also has a flat plate-shaped dielectricand a spacer for forming a discharge gapof a thin thickness in a laminating direction provided between the low voltage electrodeand the electrodean electrode cooling sheetprovided facing a main surface of the electrodeat a side opposite the discharge gapfor cooling the electrodeThe ozonizer also has a thermal conducting/electric insulating sheetsandwiched between the electrodeand the electrode cooling sheetAn alternating voltage is applied between the low voltage electrodeand the electrodeand a discharge is produced in the discharge gapinjected with oxygen gas to produce ozone gas.

Ozonizer

A volatile organic compound treatment apparatus including an adsorber coming into contact with a gas to be treated and adsorbing volatile organic compounds; a plurality of pairs of electrodes, divided into a plurality of groups, which generate electric discharge so that a part of the adsorber is exposed to the electric discharge; and an electric discharge control mechanism for controlling whether or not the electric discharge is generated in what pair of the electrodes by applying a voltage to every group of the pair of electrodes such that different parts of the adsorber are sequentially exposed to the electric discharge.

Volatile organic compound treatment apparatus

An ozonizer has a flat plate-shaped low voltage electrode, flat plate-shaped first and second high voltage electrodes facing the low voltage electrode, a first dielectric, and a first spacer, located between the low voltage electrode and the first high voltage electrode, a second dielectric, and a second spacer between the electrode and the second high voltage electrode. The ozonizer also has a first electrode cooling sheet facing the first high voltage electrode at a side opposite a first discharge gap, a second electrode cooling sheet facing the second high voltage electrode, a first thermally conducting and electrically insulating sheet sandwiched between the first high voltage electrode and the first electrode cooling sheet, and a second thermally conducting and electrically insulating sheet sandwiched between the second high voltage electrode and the second electrode cooling sheet.

A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.

Substrate treatment apparatus

An ozonizer has a flat plate-shaped low voltage electrode and a flat plate-shaped high voltage electrode facing a main surface of the low voltage electrode. The ozomzer also has a flat plate-shaped dielectric and a spacer forming a discharge gap in a laminating direction, located between the low voltage electrode and the high voltage electrode, a high voltage electrode cooling unit forming a cooling water passage insulated from the high voltage electrode inside the high voltage electrode. An alternating voltage is applied between the low voltage electrode and the high voltage electrode and a discharge is produced in the discharge gap, into which oxygen is injected, to produce ozone gas.

The ozonizer of this present invention is small in size, and capable of generating highly concentrated ozone with a high (generating) efficiency. A low voltage electrode includes a disc-shaped low voltage electrode main body facing a high voltage electrode and an extension at one side of the low voltage electrode main body, and the extensions are laminated in layers on a base via blocks, and a coolant inlet portion for supplying coolant to a coolant passage, a coolant outlet portion for exhausting coolant from the coolant passage, and an ozone gas outlet portion for exhausting ozone gas from the ozone gas passage pass through the extensions and the blocks, respectively, in a laminating direction of the discharge cells.

An ozonizer has a flat plate-shaped low voltage electrode, a flat plate-shaped high voltage electrodefacing a main surface of the low voltage electrode. The ozonizer also has a flat plate-shaped dielectricand a spacer for forming a discharge gapof a thin thickness in a laminating direction provided between the low voltage electrodeand the electrode, an electrode cooling sheetprovided facing a main surface of the electrodeat a side opposite the discharge gapfor cooling the electrode. The ozonizer also has a thermal conducting/electric insulating sheetsandwiched between the electrodeand the electrode cooling sheet. An alternating voltage is applied between the low voltage electrodeand the electrodeand a discharge is produced in the discharge gapinjected with oxygen gas to produce ozone gas.

An apparatus for removing a photoresist film includes a substrate cassette for fixing a substrate having a surface covered with a photoresist film, an ozone feed tube for supplying ozone, a liquid feed tube for supplying a liquid photoresist film removing solution, and a processing tank for recovering and processing at least one of ozone and the liquid photoresist film removing solution, wherein the liquid photoresist film removing solution is supplied through the liquid feed tube as a liquid or mist, at least one of ozone and the photoresist film removing solution being continuously supplied.

Growing community of inventors

Tokyo, Japan

Masaki Kuzumoto