Adv Antest Corporation

Fuji Xerox Co., Ltd.

Tokyo Electron Limited

Intel Corporation

Fujifilm Business Innovation Corp.

Optoelectronics Co., Ltd.

Masaki Kurokawa

Akio Yamada

Eiji Nishi

Akira Okamoto

Atsuhiro Itoh

Yuriko Inakawa

Noriyuki Tatsuma

Fumio Harada

Takanari Ishimura

Kenji Nomura

Yoshiyuki Yoda

Eiji Shimoichi

Akihide Oshima

Nobuyuki Obayashi

Shinji Sugatani

Yujiro Kobayashi

Mamoru Sasamae

Kazuhide Hasebe

Masahiro Takizawa

Shinichi Hamaguchi

Jun Wakamatsu

Masahiro Seyama

Tomoyuki Obu

Masaaki Takei

Takehiko Fujita

Yoshikazu Furusawa

Katsuhiko Komori

Takeshi Ichimura

Mitsuaki Hirono

Norifumi Kimura

Kenji Kogure

Kenji Yufu

Tatsuro Okawa

Shinichi Kojima

Yoshihisa Ooae

Kiyoshi Yasukawa

Takamasa Sato

Akitake Tamura

Masami Oikawa

Satoshi Kawasaki

Tomoya Hasegawa

Tatsuro Ohkawa

Hiroki Iriuda

Kenji Abe

Akiyoshi Tsuda

Zhihui Duan

Depei Ji

Naoya Niizeki

Hideki Nasuno

Ryuma Iwashita

Jun Higa

A processing apparatus includes: a processing container; a temperature sensor that detects a temperature therein; a gas supply unit that supplies a cleaning gas into the processing container; a pressure regulation unit that regulates a pressure in the processing container; and a control unit that controls the gas supply unit and the pressure regulation unit to perform a cleaning processing of removing a deposited film in the processing container. The control unit stores a vapor pressure curve in which the temperature in the processing container is associated with a vapor pressure of water in the processing container. In the cleaning processing, the control unit sets a target pressure below the vapor pressure curve based on the temperature detected by the temperature sensor and the vapor pressure curve, and controls the pressure regulation unit such that the pressure in the processing container becomes the target pressure.

Processing apparatus and cleaning processing method

An information processing apparatus includes a unit that receives, on a group chat, an execution command to execute specific processing that requires entry of secret information from a first user belonging to the group chat including two or more users; an acquisition unit that acquires the secret information from a second user belonging to the group chat without letting a third user belonging to the group chat and different from the second user know the secret information; and a controller that performs control so that the specific processing based on the execution command is executed by using the secret information.

Information processing apparatus and non-transitory computer readable medium

A circuit board incorporable into an apparatus includes a substrate, a reception unit that is provided on the substrate and that wirelessly receives a function program for achieving a function, a storage unit that is provided on the substrate and to which a writing program for writing the function program received by the reception unit has been written in advance, a power supply provided on the substrate, and a power control unit that supplies power for receiving, with the reception unit, the function program and power for writing, on a basis of the writing program, the function program to the storage unit using the power supply without using an external power supply.

Circuit board and method for delivering program to plurality of circuit boards

An information processing apparatus includes a memory in which information on output devices corresponding to plural users participating in a group chat is stored; and a controller that, in a case where any one of the plural users gives a post indicative of an output command to output data on the group chat, performs control for outputting the data from output devices corresponding to one or more output destination users including a user who has not given the post indicative of the output command among the plural users in accordance with the information stored in the memory.

Information processing apparatus and non-transitory computer readable medium that recognize a print command on a group chat to output data from image forming apparatuses assigned to each user

A message communication apparatus includes an operating unit that activates a chat bot, the chat bot running in a messaging service in which users exchange a message, the chat bot exchanging a message with a user, a registration unit that registers the chat bot for each user, and a controller that, if a single first chat bot has been activated in a single chat room through operation of the operating unit by a first user, causes the first chat bot to execute, in response to a message from a second user different from the first user, a function of a second chat bot registered by the second user by using the registration unit.

Message communication apparatus, non- transitory computer readable medium, and display control method

An optical code reading process and a reading stability determining process are performed while suppressing an increase in the cost of a transfer system and avoiding a decrease in work efficiency. CCD performs imaging. Processor reads a one-dimensional code contained in image data taken by CCD, and outputs a signal when a reading process in which the number of reading successes related to the one-dimensional code reaches a determination reference value is completed. In addition, processor determines reading stability during a period from the first reading success to completion of the reading process and outputs predictive maintenance information (PMI) representing a determination result of reading stability.

Optical information reading apparatus and optical information reading method

To realize a multi-beam formation device that can stably machine a fine pattern using complementary lithography, provided is a device that deforms and deflects a beam, including an aperture layer having a first aperture that deforms and passes a beam incident thereto from a first surface side of the device and a deflection layer that passes and deflects the beam that has been passed by the aperture layer. The deflection layer includes a first electrode section having a first electrode facing a beam passing space in the deflection layer corresponding to the first aperture and a second electrode section having an extending portion that extends toward the beam passing space and is independent from an adjacent layer in the deflection layer and a second electrode facing the first electrode in a manner to sandwich the beam passing space between the first electrode and an end portion of the second electrode.

Device, manufacturing method, and exposure apparatus

An information processing apparatus includes a sensing unit that senses occurrence of a predetermined fault through one of detection of the occurrence of the fault and prediction of the occurrence of the fault, and a notifying unit that, when the fault is sensed to have occurred by the sensing unit, identifies a user to be notified that the fault is sensed to have occurred from among multiple users registered in advance, and notifies an information processing terminal of the identified user that the fault has occurred.

Information processing apparatus information processing system, and non-transitory computer readable medium for providing notification to a user of occurrence of a fault

To form a complex and fine pattern by combining optical exposure technology and charged particle beam exposure technology, provided is an exposure apparatus that radiates a charged particle beam at a position corresponding to a line pattern on a sample, including a beam generating section that generates a plurality of the charged particle beams at different irradiation positions in a width direction of the line pattern; a scanning control section that performs scanning with the irradiation positions of the charged particle beams along a longitudinal direction of the line pattern; a selecting section that selects at least one charged particle beam to irradiate the sample from among the plurality of charged particle beams, at a designated irradiation position in the longitudinal direction of the line pattern; and an irradiation control section that controls the at least one selected charged particle beam to irradiate the sample.

Exposure apparatus and exposure method

An image processing device includes an authenticator, an estimator, and a controller. The authenticator uses authentication information received from a user to authenticate and determine whether or not the user is a person allowed to execute plural functions related to images. If the authenticator authenticates the user as a registered user allowed to execute the plural functions, the estimator uses history information recording information related to the execution of the plural functions to estimate a function to be executed by the user from among the plural functions. The controller controls related parts used to execute the function estimated by the estimator so that the related parts start preparing for operation before the user issues an instruction to execute some kind of function.

Image processing device and non-transitory computer-readable medium for estimating function to be executed

A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.

Multicolumn charged particle beam exposure apparatus

There is provided a charged particle beam exposure apparatus which turns an array beam including a plurality of charged particle beams, being arranged side by side in a line in a direction intersecting line patterns, on and off at predetermined blanking timing, and thus performs irradiation when irradiated positions of the charged particle beams arrive at pattern positions. The charged particle beam exposure apparatus improves data processing control by segmenting a sample provided with line patterns into a plurality of exposure ranges each at a predetermined length in a direction of movement, and performing on-off control of the beams based on a point of time when the array beam passes on a reference position set in the exposure region.

Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same

In an optical information reader controlled by this controller, a laser beam originating in light emitted by a laser diode is reflected by a scan mirror to scan optical information of a bar code or the like, reflected light therefrom is received by a photodiode to be converted to an electrical signal, and the optical information is read by processing the signal. In the controller, a main amp having a characteristic that a gain changes according to a frequency of an input signal amplifies the electrical signal, a detector detects an analog signal resulting from the amplification, and from a. detection output thereof, a MPU (on/off frequency control circuit) detects level of the analog signal and adjusts the gain of the main amp by changing an on/off frequency of the laser diode caused by an APC circuit (light emission on/off circuit), according to the detected level.

Controller for optical information reader

Provided is a charged particle beam exposure apparatus configured as follows. An electron beam emitted from an electron gun is deformed by an asymmetric illumination optical system to have an elongated section. The electron beam is then applied to a beam shaping aperture plate provided with a plurality of apertures arranged in a line, thereby generating a plurality of electron beams. Exposure of a predetermined pattern is performed on a semiconductor substrate by moving a stage device in a direction orthogonal to line patterns on the semiconductor substrate and turning the plurality of electron beams on or off in synchronization with the movement of the stage device by use of a blanker plate and a final aperture plate.

Charged particle beam exposure apparatus

Growing community of inventors

Tokyo, Japan

Masaki Kurokawa