Fujitsu Corporation

Masaki Katsube

Koichi Hashimoto

Yoshihiro Takao

Hiromi Hayashi

Tetsuo Izawa

Tatsuya Yamazaki

Atsuo Fushida

Kenichi Kanazawa

After an SAC film is formed to a thickness not to fill the spaces between gate electrodes in a memory cell region, a silicon oxide film is formed to a thickness to fill the spaces. A side wall made of a silicon oxide film is formed on the side surface of only a gate electrode in a peripheral circuit region, and a metal silicide is formed on the exposed substrate surface. A BLC film is formed on the entire surface. A contact hole is formed in self alignment using the SAC film and the BLC film. In this method, silicidation of the source/drain of a transistor in the peripheral circuit region and the self-alignment technique such as BLC or SAC can be simultaneously used to enable an increase in the degree of integration and improvement of performance of a semiconductor device having a metal silicide on the transistor in the logic circuit.

Semiconductor device and method of manufacturing the same

A semiconductor device having: a semiconductor substrate of a first conductivity type; a well formed in a surface of said semiconductor substrate, the well being of a second conductivity type opposite to the first conductivity type; a first MOS transistor formed in a surface of a first conductivity type region of the semiconductor substrate; a second MOS transistor formed in a surface of the well; a wiring connected to the gate electrodes of the first and second MOS transistors; and a protection diode with a p-n junction formed in the first conductivity type region and comprising a second conductivity type region electrically connected to the wiring and the first conductivity region of the semiconductor substrate, wherein the wiring and the well are not directly connected electrically. A CMOS type semiconductor integrated circuit device with a long and wide area wiring is realized which can effectively suppress damage to a gate oxide film of a MOSFET.

MOS LSI with projection structure

A semiconductor device having: a semiconductor substrate of a first conductivity type; a well formed in a surface of said semiconductor substrate, the welt being of a second conductivity type opposite to the first conductivity type; a first MOS transistor formed in a surface of a first conductivity type region of the semiconductor substrate; a second MOS transistor formed in a surface of the well; a wiring connected to the gate electrodes of the first and second MOS transistors; and a protection diode with a p-n junction formed in the first conductivity type region and comprising a second conductivity type region electrically connected to the wiring and the first conductivity region of the semiconductor substrate, wherein the wiring and the well are not directly connected electrically. A CMOS type semiconductor integrated circuit device with a long and wide area wiring is realized which can effectively suppress damage to a gate oxide film of a MOSFET.

On a semiconductor substrate with an exposed silicon region, a metal layer such as Co is deposited and a silicide layer is formed by heat treatment. Thereafter, a metal layer such as Ni and a silicon layer are deposited, and one of them is patterned. The metal layer and silicon layer are heated for silicification to form a local interconnect. A semiconductor device manufacturing method is provided which uses salicide technique and can form a local interconnect of good quality.

Growing community of inventors

Kawasaki, Japan

Masaki Katsube