Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Shin-etsu Handotai Co., Ltd. (1 from 1,099 patents)
2. Pre-tech Co., Ltd. (1 from 7 patents)
1 patent:
1. 5186192 - Apparatus for cleaning silicon wafer