Horiba Stec, Co., Ltd.

Horiba, Ltd.

Masaki Inoue

Masakazu Minami

Kotaro Takijiri

Yuhei Sakaguchi

Katsumi Nishimura

Hidetaka Yada

Daisuke Hayashi

Taketoshi Ito

In order to eliminate liquid accumulation occurring between a gas-liquid mixing part and a vaporization part to stably perform liquid feeding to the vaporization part and vaporization in the vaporization part, a liquid material vaporization apparatus includes: a gas-liquid mixing part adapted to mix a liquid material and gas to produce a gas-liquid mixture; and a vaporization part adapted to heat the gas-liquid mixture to vaporize the liquid material. In addition, the gas-liquid mixing part has a gas-liquid mixture lead-out pipe for leading out the gas-liquid mixture, the vaporization part has a heating flow path HS for heating the gas-liquid mixture, and a lead-out port of the gas-liquid mixture lead-out pipe is arranged in the heating flow path HS.

Liquid material vaporizaton apparatus

An object of this invention is to provide a responsive material gas concentration control system that can be mounted on a bubbling system and that can control a concentration of a material gas in a mixed gas at a constant value even though a partial pressure of the material gas fluctuates. The material gas concentration control system is used for a material evaporation system, and comprises a body that is connected to an outlet line and that has an internal flow channel for flowing the mixed gas, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a first valve that is arranged downstream of the concentration measuring part and that adjusts the measured concentration measured by the concentration measuring part at a previously determined set concentration, wherein the concentration measuring part and the first valve are mounted on the body.

Material gas concentration control system

A material gas concentration control system for keeping a concentration of a material gas in a mixed gas constant comprising a tank to accommodate the material, an inlet line to input a carrier gas for evaporating the accommodated material into the tank, and an outlet line to output the mixed gas consisting of the material gas evaporated in the tank and the carrier gas, and further comprising a first valve arranged in the inlet line, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a concentration control part that controls an open degree of the first valve so as to make the measured concentration of the material gas measured by the concentration measuring part become the previously determined set concentration.

To prevent loss of control of a pressure of a source gas within a movable range of a control valve, a source gas concentration control system is provided. The system may include a first valve that is provided on an outlet line, a concentration measurement part that measures a concentration of the source gas in mixed gas, and a concentration control part that controls a stroke of the first valve such that the measured concentration of the source gas becomes equal to a predetermined concentration setting. The measured concentration may be measured in the concentration measurement part. The system may further include a temperature controller that controls a temperature inside the tank to meet a temperature setting, and a temperature setting part that sets the temperature setting of the temperature controller.

Source gas concentration control system

Provided is a flowmeter with a flow tube through which fluid flows; a cooling apparatus adapted to cool a part of the flow tube; a first temperature detecting section for detecting the temperature of the flow tube cooled by the cooling apparatus; a second temperature detecting section for detecting the temperature of the cooling apparatus; a third temperature detecting section for detecting the temperature of a non-cooling area upstream of a cooling area in the flow tube; and an information processing section, which controls the cooling apparatus make a difference between the temperature detected by the second temperature detecting section and the temperature detected by the third temperature detecting section to be a prescribed value, and calculates the flow rate of the fluid flowing in the flow tube.

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Cupertino, CA, United States of America

Masaki Inoue