Kabushiki Kaisha Toshiba

Toshiba Memory Corporation

Masaki Hirano

Yuichi Kuroda

Kenichi Otsuka

Rempei Nakata

Manabu Takakuwa

Yuuichi Kuroda

Tsunekazu Yasutake

A particle measuring apparatus includes a light source configured to irradiate a gas with light, a first optical detection unit configured to detect an intensity of reflected light from particles contained in the gas, and configured to output a first parameter value corresponding to the intensity of the reflected light, and a storage unit that stores first data indicating corresponding relationships between first parameter values particle components. The particle measuring apparatus further includes a calculation unit configured to compare the first parameter value transmitted from the first optical detection unit with the first data transmitted from the storage unit to determine a component of the particles contained in the gas.

Particle measuring apparatus

A particle detecting apparatus has a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion, a particle detector to detect a concentration of the particles contained in the gas discharged from an outflow port of the condensing and growing unit, a particle feeder to feed, to the inflow port of the condensing and growing unit, a test gas containing test particles whose particle diameter and the number of particles per unit volume are known, and a first determinator to determine whether a concentration of the test particles contained in the test gas detected by the particle detector has a predetermined value.

Particle detecting apparatus

A particle measuring apparatus according to an embodiment includes a first supply part that introduces first gas. A second supply part introduces second gas having been filtered. A light source irradiates mixture gas including the first gas and the second gas with light. A light detector detects reflected light from the mixture gas and measures number of particles contained in the mixture gas. A pump sucks the mixture gas.

Particle measuring apparatus and particle measuring method

In accordance with an embodiment, a substrate storage container includes first and second cases, a lid and a moving unit. The first case is provided with an opening to take in or out a substrate. The lid closes the opening. The second case can move in a first direction crossing a surface of the first case. The opening is provided on the surface. The moving unit moves the second case in the first direction in response to the opening of the lid.

Substrate storage container and substrate storage container mounting table

A particle supply device according to one embodiment includes a housing and a particle supplier. The housing seals a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device. A particle supplier supplies particles to an inside of the housing.

Particle supply device and particle supply method

According to one embodiment, a pattern formation method includes forming a first mask layer including a first and a second concave pattern on a first surface of a substrate. The method can include providing a protection film in the first concave pattern. The method can include providing a self-assembling material in the second concave pattern. The method can include forming a first and a second phase in the second concave pattern by phase-separating the self-assembling material. The method can include removing the protection film together with the first phase to form a second mask layer having the first concave pattern and a third concave pattern. The third concave pattern is provided in the second concave pattern, and has an opening width narrower than an opening width of the second concave pattern. The method can include processing the substrate using the second mask layer as a mask.

Growing community of inventors

Mie, Japan

Masaki Hirano