Kyocera Corporation

Sony Corporation

Masaki Hayashi

Tsuneo Muchi

Kunihide Shikata

Kenichi Nagae

Toshihiko Uemura

An aluminum oxide sintered body contains aluminum oxide in an amount of not less than 99% by weight and at least one selected from magnesium oxide, calcium oxide and silicon oxide, and contains phosphorus of not more than 0.0025 parts by weight to 100 parts by weight of the aluminum oxide sintered body. This avoids that phosphorous exerts adverse effect on the sintering properties of an aluminum oxide sintered body, especially the sintering properties of a large aluminum oxide sintered body, causing the sintered body to lack uniformity between the sintered body inner portions and outer portions. Therefore, this aluminum oxide sintered body is suitably used in semiconductor manufacturing apparatus members or liquid crystal manufacturing apparatus members.

Aluminum oxide sintered body, and members using same for semiconductor and liquid crystal manufacturing apparatuses

An aluminous sintered product comprising 70 to 96% by weight of an alumina component and 4 to 30% by weight of additives, said additives including at least the one selected from oxides of elements of the Group 5a of periodic table and at least the one selected from oxides of metals of the iron family and oxides of manganese, titanium, calcium, magnesium, chromium and silica, and said aluminous sintered product exhibiting a volume resistivity of from 1.times.10.sup.7 to 1.times.10.sup.13 .OMEGA.-cm over a temperature range of from 25.degree. to 75.degree. C. and an absolute value of the temperature coefficient of volume resistivity of not larger than 1.8%/.degree.C. under the application of high voltages. The sintered product is used as antistatic part such as conveyer arm, handling jig, tweezers for holding wafers and the like that must not be electrostatically charged in an apparatus for producing semiconductors, and as resistance substrate, electrically conducting material, contact, heater, part in vacuum tubes, and part for electron guns in a CRT such as of TVs and the like.

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Gamou-cho, Japan

Masaki Hayashi