Mitutoyo Corporation

Masakazu Matsumoto

Keizo Takahashi

Katsuyuki Ogura

Kozo Sugita

An object of the invention is to provide a position measuring apparatus which can execute a stable accuracy assurance at a high accuracy against a deterioration with age and a temperature fluctuation of the apparatus while making a correction of an existing volumetric measuring accuracy effective. In order to achieve the object, in accordance with the present invention, in a position measuring apparatus which measures a target position within a specified coordinate space with respect to a predetermined reference surface ( ) on the basis of a coordinate system so as to compensate errors, there is provided a detector ( ) for measuring whether or not a change is occurred in a relation with respect to the reference surface ( ), in a movement executed by a moving machine ( ), and there is further provided with an error corrector ( ) for correcting at least any one of a compensation parameter compensating a positional coordinates by an error compensator ( ) and a positional coordinate compensated by the error compensator ( ), on the basis of an amount of change of a relation measured by the detector ( ), in the case that the change is occurred.

Position measuring apparatus and working apparatus using the same

A coordinate measuring machine having a gate-type slider device, which includes a pair of columns in a parallel state to each other and a beam crossing from one column to another one, the gate-type slider being movable with reference to a table, so that the coordinate measuring machine is capable of the measurement of dimensions and configuration of an object to be measured by using a measuring element which is attached to the slider device; the coordinate measuring machine having at least one driving device for moving the slider device by relating to the column, the driving device being above the table and below the center of gravity of the slider device, so that the inertia of the slider is minimized and the fine measurement is performed.

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Utsunomiya, Japan

Masakazu Matsumoto