Tosoh Quartz Corporation

Tosoh Corporation

Tosoh Smg Corporation

Masakazu Kudoh

Yoshinori Harada

Shinkichi Hashimoto

Shuzo Mizutani

Yoshihiko Gotoh

Shinichi Satoh

Naoki Miura

Katsufumi Takahashi

Hideki Kiyohara

The invention provides a method for manufacturing a large scale quartz glass slab ingot in a flame hydrolysis reaction in a furnace, including the steps of rotating the furnace, depositing a fused silica on a furnace bed, and extending the deposit outwardly by heating and rotation of the furnace, thereby a quartz glass slab ingot is obtained. A quartz glass burner is installed at the ceiling of the furnace, hydrogen gas supplied to the burner flows down along the tapered wall of the oxygen chamber and is ejected into the outer casing. Part of the hydrogen gas is deflected to the center of the burner and mixed with the oxygen just after the ejection from the oxygen gas nozzles. Thereby, the flame is formed smoothly and the thermal efficiency is improved. The flame becomes wide enough and the silica powder transported by the hydrogen gas is uniformly fused by the flame and heat capacity of the fused silica.

Method for manufacturing quartz glass ingot

Highly durable silica glass containing 0.01% to 2% by weight of at least one element selected from magnesium, calcium, strontium, barium, yttrium, hafnium and zirconium. The silica glass is produced by melting a powdery material comprising a finely divided silica powder and a finely divided zirconium-containing substance by oxyhydrogen flame or plasma are to form an accumulated molten material layer, and extending the molten material layer outwardly in radial directions.

Highly durable silica glass, process and apparatus for producing same, and member and apparatus provided with same

Growing community of inventors

Yamagata, Japan

Masakazu Kudoh