Ebara Corporation

Ebara Coporation

Masaji Akahori

Kunio Fujiwara

Takanobu Sugo

Hideo Kawazu

Junichi Kanno

Teruo Masubuchi

Naotoshi Endo

Satoshi Konishi

Hiroshi Nagai

Takayuki Saito

Takashi Kawakami

Kunihiro Miyazaki

Soichi Nadahara

Kazuyoshi Takeda

Takayoshi Kawamoto

Noriaki Seko

Akio Katakai

Syu Nakanishi

Ken Nakajima

Sota Nakagawa

Keiji Hasegawa

Toru Akiyama

Shin Hasegawa

Hideyuki Misawa

Kinya Usuda

Shinzi Miura

In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

Material supply system in semiconductor device manufacturing plant

An object of the present invention is to provide a structure of a metal collecting material for use in seawater or river water or industrial wastewater to give the most excellent adsorption efficiency. Another object of the present invention is to provide a process for efficiently separating and recovering valuable metals or noxious metals from a metal collecting material having collected said valuable metals from seawater or noxious metals from river water or wastewater with the least possible waste generation. A metal collector according to an aspect of the present invention is formed by stacking at least partially alternate layers of a fibrous metal collecting material with a spacer for introducing a liquid to be treated into said collecting material, wherein the area of spacer side faces represents 25-75% of the total area of collecting material side faces and spacer side faces in the side faces of the stack. A process for eluting and recovering a metal from a metal collecting material according to another aspect of the present invention comprises the steps: (1) contacting the metal collecting material having absorbed a metal with a dilute eluent, (2) contacting the metal collecting material with an eluent more concentrated than in step 1 to recover the metal into the eluent; and (3) contacting a metal resorbing material with the eluate from step 2 to resorb the metal.

Metal-collecting apparatus and method for elution and recovery of metal from metal-collecting material

A radiation graft treated material in the form of a woven or non-woven fabric material that is composed of polymer monofilament fiber of which only the surface has undergone a radiation-induced graft polymerization but of which the center remains unaffected by grafting.

Polymer substrates for radiation-induced graft polymerization and filter stock

A method for performing radiation-inducted graft polymerization on substrates in the form of webs of woven or non-woven fabric, which includes the steps of exposing a substrate woven or non-woven fabric composed of polymer fiber to electron beams in a nitrogen atmosphere, contacting the irradiated substrate with a specified amount of monomer in a nitrogen atmosphere, and subjecting the monomer and the substrate in mutual contact to graft polymerization in a nitrogen atmosphere, characterized in that the first through third steps are performed in succession.

A polymer substrate for radiation-induced graft polymerization in the form of a woven or non-woven fabric that comprises a woven or non-woven fabric composed of polymer fiber and a reinforcement polymer having a greater strength and a slower rate of radiation-induced graft polymerization than said polymer fiber. Also, radiation graft treated stock prepared from said polymer substrate. In another aspect, a radiation graft treated material in the form of a woven or non-woven fabric material that is composed of polymer monofilament fiber of which only the surface has undergone a radiation-induced graft polymerization but of which the center remains unaffected by grafting. In addition, a method for performing radiation-induced graft polymerization on substrates in the form of webs of woven or non-woven fabric, which comprises the steps of exposing a substrate woven or non-woven fabric composed of polymer fiber to electron beams in a nitrogen atmosphere, contacting the irradiated substrate with a specified amount of monomer in a nitrogen atmosphere, and subjecting the monomer and the substrate in mutual contact to graft polymerization in a nitrogen atmosphere, characterized in that the first through third steps are performed in succession.

Apparatus for radiation-induced graft polymerization treatment of fabric webs

The object of this invention is to provide an electrical deionization apparatus with which various feed water types ranging from water of high ion concentration to water of low ion concentration can be consistently deionized with high efficiency. At least part of cation-exchange membranes and anion-exchange membranes alternate between electrodes to form an alternating array of deionization and concentration compartments and the deionization compartment contains a woven or non-woven fabric made of cation-exchange fiber that is placed on the cation-exchange membrane side in a face-to-face relationship with a woven or non-woven fabric made of anion-exchange fiber that is placed on the anion-exchange membrane side, with the passageway of feed water between the two woven or non-woven fabrics containing an ion-conducting spacer provided with an ion-exchanging capability.

Electric deionization apparatus

Growing community of inventors

Tokyo, Japan

Masaji Akahori