Hitachi, Ltd.

Masaie Tokai

Shinobu Ezaki

Minoru Kuroiwa

A continuous vacuum processing apparatus has at least one preliminary vacuum chamber respectively disposed in front of and rear of a vacuum processing chamber. The preliminary vacuum chamber is provided with a slit-shaped seal for sealing the vacuum processing chamber from outside. The preliminary vacuum chamber which is located closest to the atmosphere is provided with an adjusting valve for adjusting the evacuation rate. Alternatively, the preliminary vacuum chamber which is located closest to the atmosphere is shorter that other preliminary vacuum chambers.

Continuous vacuum processing apparatus

A continuous vacuum processing apparatus including a slit-type sealing portion and a guide roller for guiding an object to be processed. The guide roller is provided at each of the two sides of the sealing portion or at one side thereof. Tension is applied to the object to be processed by another device provided between the guide rollers while the object is being conveyed, so as to enable it to be processed without being damaged.

Growing community of inventors

Ryugasaki, Japan

Masaie Tokai