Hitachi, Ltd.

Shin-etsu Chemical Co., Ltd.

Masaie Tohkai

Susumu Ueno

Hirokazu Nomura

Hajime Kitamura

Kiyoshi Imada

Kenichi Kato

Yukishige Kamino

Kouiti Kuroda

Shinobu Ezaki

Yoshitada Hata

Nobuyuki Hiraishi

Ken-ichi Kato

A continuous vacuum processing apparatus has a vacuum processing chamber and at least one auxiliary vacuum chamber connected to at least one of the upstream and downstream ends of the vacuum processing chamber as viewed in the direction of flow of a material to be processed. The apparatus further has a slit-type seal device provided in the auxiliary vacuum chamber and capable of conveying the material to be processed while sealing the vacuum processing chamber from exterior of the vacuum processing chamber. The seal device is provided with a guide member for guiding the material. Independent tensioning devices are provided in the vacuum processing chamber and the auxiliary vacuum chamber and capable of independently applying tensions to the portions of the material in the vacuum processing chamber and auxiliary vacuum chamber, so that a material which is not resistant to heat can be processed without being damaged.

Continuous vacuum processing apparatus

A continuous vacuum treating apparatus having a vacuum treating chamber for continuously treating the surface of a plastic molding under a vacuum, and at least one auxiliary vacuum chamber disposed at each of the upstream and downstream sides of the vacuum treating chamber. Each auxiliary vacuum treating chamber includes a pair of seal rolls contacting each other, means for effecting seals between the seal rolls and cases over the entire axial lengths of the rolls, and means for effecting seals between both end surfaces and the cases.

Continuous vacuum treating apparatus

A continuous vacuum treating apparatus for subjecting a workpiece of soft material, such as a plastic molding to continuous surface treatment by an air-to-air system in vacuum, including a vacuum treating chamber and a plurality of auxiliary vacuum chambers located anterior and posterior to the vacuum treating chamber. The diameter of each of an upper seal roll and a lower seal roll of each of the auxiliary vacuum chambers located on the vacuum treating chamber side is smaller than the diameter of each of an upper seal roll and a lower seal roll of the auxiliary vacuum chamber located closest to the atmosphere.

Roll seal boxes for continuous vacuum treating apparatus

Growing community of inventors

Ibaraki, Japan

Masaie Tohkai