Tdk Corporation

Masaichi Miyano

Mitsunao Homma

Yoshiki Ohta

Sei Kakinuma

Keiji Oguchi

Katsuya Iwai

A piezoelectric device includes a body provided with a first region and a second region lined along a first direction. The first region deformably extends/contracts along the first direction. The second region deformably curves in such a manner that one or the other side in a second direction intersecting the first direction curves outward.

Piezoelectric device

A piezoelectric actuator has a piezoelectric element adapted to simultaneously generate first and second vibration modes in response to a voltage applied thereto. The piezoelectric element has one outer surface including a first region and a second region projecting from the first region, while the second region comes into contact with a body to be driven, so as to cause a frictional force with the body to be driven. Without restricting the size of the piezoelectric element, the piezoelectric actuator inhibits its driving state from fluctuating.

Piezoelectric actuator

A piezoelectric actuator has a piezoelectric element and a frictional portion. The piezoelectric element simultaneously generates first and second vibration modes in response to a voltage applied thereto. The frictional portion is arranged on an outer surface of the piezoelectric element and adapted to come into contact with a body to be driven and cause a frictional force therewith. The frictional portion has a glass-containing portion containing a glass material and being aimed such as to project from the outer surface of the piezoelectric element. Without restricting the size of the piezoelectric element, the piezoelectric actuator inhibits its driving state from fluctuating.

The actuator in accordance with the present invention is provided with a pair of arms and a connecting part for connecting them to each other. The arms and connecting part are integrally formed from single-crystal silicon. Respective piezoelectric devices are attached to the arms.

Actuator having a pair of arms with piezoelectric devices attached thereto and methods of making the same

An actuator to which leads are easily attachable, and a method of making the same are provided. In the actuator in accordance with the present invention, a pair of silicon arms have their resistances lowered by being doped with impurities and are connected to each other by way of a glass substrate. A predetermined surface of each silicon arm is formed with a piezoelectric part, whereas a predetermined surface of the piezoelectric part is formed with a thin-film electrode. Therefore, the piezoelectric part is driven when a voltage is applied between a bonding wire attached to the thin-film electrode and a bonding wire attached to the silicon arm. Since the bonding wire can be attached to the silicon arm at any position thereon, wire bonding can be carried out while appropriately selecting positions and surfaces where the bonding wire is easily attachable.

Actuator having doped silicon arms and method of making the same

A semiconductor magnetoresistance device having plural pairs of opposed short-circuiting electrodes ( ) on the opposed surfaces of a semiconductor magneto-sensitive layer ( ) shows a great resistance change relative to a magnetic flux density.

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Tokyo, Japan

Masaichi Miyano