Adv Antest Corporation

Masaichi Hashimoto

Akiyoshi Irisawa

Takeshi Konno

Takao Sakurai

Kouji Sasaki

Kazunori Shiota

Wataru Narazaki

Shigeru Ono

A light measurement apparatus includes a master laser, a slave laser, an illumination light pulse, and a signal-under-measurement generator. The master laser generates as an output a master laser light pulse, and the slave laser generates as an output a slave laser light pulse having a repetition frequency or a phase different from that of the master laser light pulse. The illumination light pulse generator receives the master laser light pulse and generates as an output an illumination light pulse, and the signal-under-measurement generator, at a point in time when receiving a light pulse under measurement obtained by illuminating the object under measurement with the illumination light pulse and further the slave laser light pulse, generates as an output a signal under measurement according to a power of the light pulse under measurement. The apparatus corrects an error in a measurement of the signal under measurement.

Light measurement apparatus, method, program and recording medium

According to the present invention, an electromagnetic wave measurement device includes: an electromagnetic wave detector, a frequency component acquisition unit, and a thickness indication quantity deriving unit. An object to be measured is disposed on a substrate and includes at least two layers, and the electromagnetic wave detector detects a substrate-surface-reflected electromagnetic wave which has been made incident to the object, has been reflected by the substrate, and has passed through the object. The frequency component acquisition unit acquires an amplitude of a frequency component of the substrate-surface-reflected electromagnetic wave. The thickness indication quantity deriving unit derives a thickness indication quantity based on the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave and a relationship between the thickness indication quantity and the amplitude of the frequency component of the substrate-surface-reflected electromagnetic wave.

Electromagnetic wave measurement device, measurement method, and recording medium

A trigger signal generation device restrains a jitter from being generated in a measurement result of light, such as terahertz light, that has transmitted through a device under test. The device includes a first photoelectric conversion unit that applies photoelectric conversion to a probe light pulse, a second photoelectric conversion unit that applies photoelectric conversion to a pump light pulse, a first amplification unit that amplifies an output from the first photoelectric conversion unit, and a second amplification unit that amplifies an output from the second photoelectric conversion unit. The device also includes a trigger signal output unit that outputs a cross-correlation of outputs of the first amplification unit and the second amplification unit as a trigger signal, and a period difference adjustment unit that adjusts a difference in periods.

Light measurement apparatus and a trigger signal generator

A sampler module is disclosed for use in a sampling waveform measurement device that samples subject signals and measures the waveform of the signals. The module is constructed by accommodating within a metal container: a laser diode driver circuit that receives laser drive sampling pulse signals from the outside and supplies pulse drive signals by a gain switching method, a laser diode that receives the drive signals from the LD driver circuit and generates optical probe pulse light, a sampling photoconductor that performs switching in accordance with irradiated light pulses and samples the subject signals, a condenser that focuses optical probe pulse light from the laser diode upon the photoconductor, and cooling temperature control means that maintains the temperature of the laser diode at a fixed temperature.

Growing community of inventors

Miyagi, Japan

Masaichi Hashimoto