Canon Kabushiki Kaisha

Masahito Niibe

Yasuaki Fukuda

Masami Hayashida

Takashi Iizuka

Yutaka Watanabe

Norio Kaneko

Tetsuya Kaneko

Hidetoshi Suzuki

Mitsutoshi Hasegawa

Masayuki Suzuki

Toshihiko Miyazaki

Hisaaki Kawade

Toshikazu Ohnishi

Yoshinori Tomida

Tsutomu Ikeda

Osamu Takamatsu

Naoto Nakamura

Yuji Kasanuki

Masahiro Tagawa

Tadashi Kaneko

Yoshimasa Okamura

Shigetaro Ogura

An electron-emitting device having an electroconductive film including an electron-emitting region and arranged between a pair of electrodes is manufactured by forming an electroconductive film on a substrate and producing an electron-emitting region in the electroconductive film. The electroconductive film is formed on the substrate by heating the substrate in an atmosphere containing a gasified organic metal compound to a temperature higher than the decomposition of the gasified organic metal compound.

Method of manufacturing electron-emitting device and image-forming

An image display apparatus comprises a plurality of electron-emitting devices and an image-forming member for forming an image upon irradiation of electron beams emitted from the electron-emitting devices. The apparatus further comprises a plurality of substrates having the electron-emitting devices arrayed thereon and being arranged side by side, and a deviating unit for deviating the electron beams emitted from the electron-emitting devices arrayed on the substrates. The deviating unit deviates the electron beams toward the boundary between the substrates. When the plurality of substrates are combined with each other to provide the image forming apparatus having a large-sized screen, a display incapable region is prevented from appearing at the boundary between the substrates.

Image display apparatus

An image-forming apparatus comprises a rear plate bearing thereon electron-emitting devices, a face plate bearing thereon an image-forming member and arranged vis-a-vis the rear plate, a support frame arranged between the rear plate and the face plate to enclose the periphery of the space delimited by the plates and define the distance therebetween and spacers arranged between the face plate and the rear plate and designed to produce images on the image-forming member by irradiating the image-forming member with electrons emitted from the electron-emitting devices. The spacers are shorter than the distance between the face plate and the rear plate defined by the support frame and the spacers are rigidly bonded at least at an end thereof to the rear plate or the face plate by means of an adhesive agent.

Image forming apparatus and method of manufacturing the same

A multilayer film for X-rays comprising two kinds of films having different refractive indices, deposited alternately, wherein one of said two kinds of films which has smaller refractive index consists of an alloy containing Co and Cr. The multilayer film is capable of being utilized as an optical element such as a reflection mirror or a reflection-type X-ray mask.

Multilayer film for X-rays

A temperature distribution of an object, such as an optical element, onto which radiation energy is irradiated, is measured. The change of the shape of the object is controlled by varying the temperature of a part of the object on the basis of the measured temperature distribution to stabilize the shape of the object. Also, the shape of the object being irradiated is stabilized by causing the same temperature distribution in the object when in the thermally stable condition to be generated in the object while it is being irradiated. If the shapes of masks used to manufacture semiconductor devices are stabilized by using the above methods, highly integrated semiconductor devices can be manufactured.

Method of and apparatus for stabilizing shapes of objects, such as

A method and device for imaging an object illuminated by an X-ray beam, through a zone plate, is disclosed. A concave mirror with a multilayered film is disposed on a path of the X-ray beam to reflect the same and collect the same onto the object.

X-ray microscope

A method and apparatus for removing unclear matter on an optical element used with a radiation beam is disclosed. A filter is used to introduce light of a desired wavelength into a chamber in which the optical element is accommodated; a gas supplying device is used to supply a reactive gas which is reactable with the unclear matter on the surface of the optical element; and a vacuum-evacuating device is used to vacuum-evacuate the inside of the chamber.

Apparatus for cleaning an optical element for use with a radiation beam

A reflection type mask usable to print a pattern upon a semiconductor wafer by use of soft X-rays or otherwise is disclosed. A reflective surface is formed by a multilayered film which is formed on a substrate by layering different materials having different refractive indices in consideration of Bragg diffraction and Fresnel reflection. A non-reflective portion is formed on the reflecting surface to provide a desired pattern. Alternatively, a pattern comprising a multilayered structure may be formed upon a non-reflective substrate. The mask of the present invention assures pattern printing of high contrast.

Reflection type mask

A composition for dielectric porcelain comprises Bi.sub.2 O.sub.3, TiO.sub.2 and RuO.sub.2.

Composition for dielectric porcelain, dielectric porcelain and capacitor

A composition for dielectric porcelain comprises BaTiO.sub.3 and 1 to 5 mole % of a compound with a molar ratio of Bi.sub.2 O.sub.3 :RuO.sub.2 =1:2 based on said BaTiO.sub.3.

Growing community of inventors

Atsugi, Japan

Masahito Niibe