Disco Corporation

Asahi Kasei Chemicals Corporation

Asahi Kasei Kabushiki Kaisha

Masahiro Tsukamoto

Atsushi Shimizu

Ken Togashi

Hirokazu Ohno

Tomohiro Niihama

Hiroshi Nomura

Yohsuke Koizumi

A laser processing apparatus for processing a plate-shaped workpiece by applying a laser beam to the workpiece, includes a cassette table for placing thereon a cassette in which a plurality of workpieces are accommodated, a carrying-out unit for carrying out the workpiece from the cassette placed on the cassette table, and a laser beam applying unit including a focusing unit for applying the laser beam to the workpiece held on the chuck table. The carrying-out unit carries out the workpiece having been processed by the laser beam applying unit from the chuck table, and accommodates the workpiece into the cassette placed on the cassette table.

Laser processing apparatus

A wafer processing system includes a laser processing apparatus, a grinding apparatus, a tape sticking apparatus, a first cassette placement part, a second cassette placement part, a conveying unit that conveys a wafer, and a controller that controls the respective constituent elements. The controller includes a first processing program instructing section that conveys a wafer unloaded from a first cassette in order of the laser processing apparatus, the grinding apparatus, the tape sticking apparatus, and a second cassette and sequentially carries out processing by each apparatus for the one wafer, and a second processing program instructing section that conveys the wafer unloaded from the first cassette in order of the grinding apparatus, the laser processing apparatus, the tape sticking apparatus, and the second cassette and sequentially carries out processing by each apparatus for the one wafer.

Wafer processing system

A frame unit is transferred from a cassette to a predetermined position. The frame unit has a platelike workpiece, a tape attached to the workpiece, and a ring frame supporting a peripheral portion of the tape. The apparatus includes a holding unit for the frame unit, a moving unit for the holding unit, and a control unit. The holding unit includes a pair of gripping portions for gripping a front portion of the ring frame at two separate positions, and an abutting portion adapted to abut against the outer circumference of the ring frame. The ring frame is gripped, partially drawn from the cassette, and released. The abutting portion is brought into abutment against the outer circumference of the ring frame so as to move the ring frame into the cassette. The ring frame is gripped again, raised, and transferred to the predetermined position.

Transfer apparatus, processing apparatus, and transfer method

A method for driving an internal combustion engine is a method for reducing nitrogen oxides in emissions of the internal combustion engine, and includes a process of introducing air, which has a low oxygen concentration and contains no emissions, into the internal combustion engine, and a process of mixing humidifying water with a hydrocarbon fuel and injecting the mixture into a combustion chamber of the internal combustion engine as an emulsion fuel.

Method for driving internal combustion engine, and air supply device

Apparatus determines whether a stored object is a wafer alone or a frame unit formed by uniting the wafer and a ring frame. The apparatus includes first and second detecting units, the second detecting unit being stored more shallowly than the first detecting unit. The apparatus determines whether light transmitted by the first detecting unit is blocked by the object and does not reach a light receiving portion of the first detecting unit. When light transmitted from the second detecting unit is blocked by the object and does not reach a light receiving portion of the second detecting unit, the apparatus determines that the object is the frame unit, whereas when the light transmitted from the second detecting unit is not blocked by the object and reaches the light receiving portion of the second detecting unit, the apparatus determines that the object is the wafer.

Determining apparatus for determining object stored in cassette

Provided are a method for reducing a nitrogen oxide in an exhaust gas from an internal combustion engine, a membrane module, an apparatus for reducing a nitrogen oxide from an internal combustion engine using the membrane module, and an internal combustion engine apparatus. A method for reducing a nitrogen oxide in an exhaust gas from an internal combustion engine, the method comprising: a step of bringing pressurized air into contact with one surface of a steam permeable membrane (), and allowing water to flow along the other surface of the steam permeable membrane () to moisturize the pressurized air; and a step of introducing the moisturized air into the internal combustion engine.

Method for reducing nitrogen oxide from internal combustion engine and apparatus therefor

The present invention provides a membrane element, a gas separation device, and an internal combustion engine capable of improving gas separation performance. A gas separation deviceincluding membrane elementsincludes rigid membersarranged in a direction intersecting folds of a pleated structurein open regions Rand Rof the pleated structuresurrounded by a reinforcement frame. The open regions Rand Rare each separated into a supply region and an exhaust region of gas by an elastic epoxy resin adhesive S provided between the rigid memberand the pleated structure

Growing community of inventors

Tokyo, Japan

Masahiro Tsukamoto