Nippon Soken, Inc.

Nippondenso Co., Ltd.

Toyota Jidosha Kogyo Kabushiki Kaisha

Science and Technology Agency Natl. Institute for Research in Inorganic

Masahiro Tomita

Shigeru Takagi

Yukihisa Takeuchi

Eturo Yasuda

Susumu Sato

Shigeru Kamiya

Kiyoshi Kobashi

Kiyohiko Oishi

Toshihiko Igashira

Yasuyuki Sakakibara

Takeshi Tanaka

Seiko Abe

Hiroshi Tanaka

Hiroshi Yorita

Motoki Ito

Hitoshi Niwa

Satoshi Hayashi

Yasuo Souki

Masao Wakayama

Kazuo Tanaka

Akira Fujii

Hitoshi Yoshida

Akira Fukami

Kazuo Shinoda

Akio Iwase

Masaei Nozawa

Sigeru Kamiya

Hirokatsu Mukai

Junzi Mizuno

Nobutoshi Hayashi

Shin-ichi Shirasaki

Yasushi Sawada

Shinro Oda

Yoshinori Nakayama

Michihiro Wakimoto

Toshiyuki Tukao

Toshiyuki Tsukao

Hirosi Matuoka

Masayoshi Tanigawa

Naoto Niwa

Hiroshi Matuoka

A semiconductor wafer etching method is disclosed that allows etching without use of restricted ozone-destroying solvents such as trichloroethane or fluorocarbons. This method involves forming a protective film of silicon resin or alkali resistant resin on a semiconductor wafer. Then, a surface region of the wafer not covered by the protective film is etched. Finally, the protective film is peeled from the semiconductor wafer without damaging the wafer or employing solvents harmful to the environment.

Semiconductor wafer etching method

A method for preparing a piezoelectric or dielectric ceramic sheet by firing a shaped body made of a piezoelectric or dielectric ceramic powder while the shaped body is sandwiched between substrates. The method results in a significant improvement in the degree of displacement of a piezoelectric ceramic and significantly decreased warpage of the shaped body during sintering.

Process for producing piezoelectric ceramic sheet and dielectric ceramic

According to the present invention there is provided a piezoelectric type actuator wherein a compressive force is exerted on a piezoelectric laminate, using a coil spring having a relatively small spring constant and a coned disc spring having a relatively large spring constant, the said compressive force being in the range of 4.0 to 50 in terms of the ratio of the spring constant of the coned disc spring to that of the coil spring. Under the above construction, the performance of the piezoelectric laminate is not deteriorated under any conditions during use, and the size of the piezoelectric type actuator can be reduced.

Piezoelectric type actuator

Aqueous titanium tetrachloride solution and aqueous zirconium nitrate solution of components except zirconium, for forming lead zirconate-tinatate in which part of the lead is substituted for any of the lanthanide elements are mixed, and the mixture is hydrolyzed to form sol. This sol is cleaned, dried, and calcined at 1100.degree. C. to form modified powder. The compounds of the remaining component of lead zirconate-titanate, such as TiO.sub.2 powder, PbO powder and Sm.sub.2 O.sub.3 powder, are mixed with the modified powder, and the resultant mixture is calcined at 750.degree. C. for 1 hour to produce the lead zirconate-titanate.

Method for producing two-component or three-component lead

Piezoelectric ceramic materials comprising a ternary fundamental solid solution of 0.5 to 5.0 mol % of Pb(Y.sub.1/2 Nb.sub.1/2)O.sub.3, 40.0 to 50.0 mol % of PbTiO.sub.3, and 45.0 to 59.5 mol % of PbZrO.sub.3 are described. In the ceramic materials, part of Pb in the solid solution is substituted with 5.0 to 15.0 mol % of Sr, and at least one member selected from the group consisting of Nb.sub.2 O.sub.5, WO.sub.3, La.sub.2 O.sub.3, TaO.sub.3, Bi.sub.2 O.sub.3, Tb.sub.4 O.sub.7, NdO and Pr.sub.6 O.sub.11 is further contained in the solid solution in an amount of 0.1 to 2.0 wt % of the solid solution.

Piezoelectric ceramic materials

A pilot injection system according to the present invention, which is used in a fuel injection pump, has a casing attached to the pump. The casing connects internally with a pump chamber of the injection pump. A partition wall is fixed in the casing, whereby the pump chamber is divided from the inside of the casing. A movable wall, which is movably located in the casing, divides the inside space of the casing between a fuel-spill chamber and a holding chamber. The partition wall is formed with a valve hole, which connects the pump chamber and the spill chamber. The valve hole has a seat surface which faces the pump chamber. A valve plug, which is located in the pump chamber, can be seated on the seat surface. The valve plug is connected to the movable wall by means of a coupling rod, which extends through the valve hole. Located in the spill chamber is a return spring which urges the movable wall in a direction such that the valve plug closes the valve hole. Moreover, an actuator for moving the movable wall is disposed in the holding chamber of the casing. The actuator includes a stack of piezoelectric elements, which can extend or contract in accordance with a voltage applied thereto.

Pilot injection system for fuel injection pump

A high voltage generating device with a PZT element is disclosed. The device includes an energization control unit for generating an energization voltage, a PZT element unit for performing voltage conversion in response to an output from the energization control unit, and a load unit for receiving an output from the PZT element unit. The PZT element unit is provided with a resonating member and an electrostrictive element, and a period of an output voltage from the energization control unit is controlled so that a primary voltage from the PZT element unit becomes maximum at a timing when the output voltage from the energization control unit is not supplied.

High voltage generating device

A piezoelectric ceramic material composed of a ternary solid solution of Pb(Ni.sub.1/3 Nb.sub.2/3)O.sub.3 - PbTiO.sub.3 - PbZrO.sub.3 having the composition within an area encircled by lines connecting points A(15 mol % of Pb(Ni.sub.1/3 Nb.sub.170 )O.sub.3, 45 mol % of PbTiO.sub.3 and 40 mol % of PbZrO.sub.3), F(40 mol % of Pb(Ni.sub.166 Nb.sub.2/3)O.sub.3, 30 mol % of PbTiO.sub.3 and 30 mol % of PbZrO.sub.3), C(51 mol % of Pb(Ni.sub.1/3 Nb.sub.2/3)O.sub.3, 24 mol % of PbTiO.sub.3 and 25 mol % of PbZrO.sub.3), G(45 mol % of Pb(Ni.sub.1/3 Nb.sub.2/3)O.sub.3, 35 mol % of PbTiO.sub.3 and 20 mol % of PbZrO.sub.3), H(40 mol % of Pb(Ni.sub.1/3 Nb.sub.170 )O.sub.3, 40 mol % of PbTiO.sub.3, and 20 mol % of PbZrO.sub.3) and I(30 mol % of Pb(Ni.sub.1/3 Nb.sub.2/3)O.sub.3, 45 mol % of PbTiO.sub.3 and 25 mol % PbZrO.sub.3). And at least one additive selected from the group consisting of Sb.sub.2 O.sub.3, Nb.sub.2 O.sub.5, Bi.sub.2 O.sub.3, La.sub.2 O.sub.3, WO.sub.3 is added to the ternary solid solution in an amount of 0.1 to 1.0 weight % of the ternary solid solution.

A piezoelectric laminate stack having a plurality of piezoelectric plates manufactured of a piezoelectric element, and a plurality of metal plates. The metal plates have approximately the same shape as the piezoelectric plates, and are formed with at least two projections, respectively, on the periphery thereof. The length of the projections is greater than the thickness of the piezoelectric plates. The piezoelectric plates and the metal plates are alternately stacked. The projections of a first group of metal plates are located at angular positions different to angular positions of the projections of a second group of metal plates. The projections are bent in a direction along the axis of the laminate stack in such a manner that the first group of metal plates are electrically connected together and the second group of the metal plates are electrically connected together.

Piezoelectric laminate stack

In an apparatus for controlling an electroexpansive actuator, a high voltage is applied to the electroexpansive actuator at a non-load state after an expansion and contraction operation thereupon is completed.

Apparatus for controlling electroexpansive actuator avoiding

A piezoelectric transducer comprising a lamination of piezoelectric elements including one or more elements in which the distortion has a positive temperature dependency and one or more elements in which the distortion has a negative temperature dependency. By selecting the ratio of the number of the piezoelectric elements having the positive and negative temperature dependencies, the temperature dependency of the distortion of a transducer can be eliminated. An actuator for injecting fuel into an automobile at a high speed and delicate response to external operation is provided.

Temperature compensated stack of piezoelectric elements

A piezoelectric actuator comprises a housing having an inside cavity in which is mounted a column of piezoelectric elements having interleaved electrodes. The column of piezoelectric elements is mounted within a sealed enclosure which divides the inside cavity of the housing into an inner space receiving the column of piezoelectric elements and an outer space. The inner space is filled with a flowable, electrically insulative, thermally conductive material such as silicone oil held in direct contact with and in a heat transfer relationship with the column of piezoelectric elements. The silicone oil serves to isolate the column of piezoelectric elements and the electrodes from moisture and other foreign materials that would otherwise affect an insulation breakdown voltage. A cooling liquid is adapted to be circulated through the outer space surrounding the enclosure to absorb heat transferred thereto from the column of piezoelectric elements through the flowable thermally conducting material. The piezoelectric actuator may be incorporated with a fuel injection nozzle to form a pump injector which pressurizes and injects fuel at each energization of the column of piezoelectric elements.

Piezoelectric actuator and a piezoelectric pump injector incorporating

A filter for cleaning exhaust gases emitted from a diesel engine and a method for producing the same are disclosed. The filter is composed of a cleaning portion formed of porous ceramic, through which the exhaust gases flow and in which carbon particulates in the exhaust gases are collected, and an outer wall portion formed of the same kind of material as that of the cleaning portion, which is formed around the cleaning portion so as to be integral therewith. The bulk density of the outer wall portion increases from the inner periphery thereof toward the outer periphery thereof so that the exhaust gases can be prevented from flowing out of the outer wall portion. The filter of the present invention can be formed by immersing an organic three dimensional network structure such as polyurethane foam, within a ceramic slurry bath, spraying ceramic slurry to the outer surface of the structure, and firing the obtained structure to which ceramic slurry is sprayed.

Method for producing a ceramic filter for cleaning exhaust gases from a

A carbon particulates cleaning device comprises a casing, a filter for catching and collecting carbon particulates included in the exhaust gas within the casing, an oxidizing catalyst carrier which is disposed within the casing and a fuel supply means for supplying the fuel into the interior of the casing. When the volume of the carbon particulates caught and collected by the filter reaches a predetermined volume, the fuel is supplied from the fuel supply means into the interior of the casing and burnt by the oxidization promoting action of the oxidizing catalyst. And the caught and collected carbon particulates are burnt and cleaned due to the burning heat of the fuel.

Carbon particulates cleaning device for diesel engine

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Anjo, Japan

Masahiro Tomita