Seiko Epson Corporation

Seiko Npc Corporation

Masahiro Oshio

Keiichi Yamaguchi

Seiichiro Ogura

Takashi Yamazaki

Takayuki Kikuchi

Ryuta Nishizawa

Yoshinao Yanagisawa

Masayuki Takahashi

Toshihiro Nishida

Michiaki Takagi

Katsuro Yoneya

Takamitsu Higuchi

Makoto Furuhata

Kenji Sato

Masashi Shimura

Shogo Sasaki

Satoru Hayashi

Takehiko Shindo

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle

Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle

A vibrator device includes: a vibrator element that includes a vibrator substrate including a vibrating arm, and an electrode arranged in the vibrator substrate; a base; a support substrate that includes a base mount fixed to the base, an element support that supports the vibrator element, and a beam that connects between the base mount and the element support, and supports the vibrator element relative to the base; a wiring pattern that is arranged in the support substrate, and is electrically connected to the vibrator element; and a buffer member that is arranged on the wiring pattern of the support substrate, and whose hardness is lower than that of the support substrate. Also the buffer member is arranged on a face of the support substrate, that opposes the vibrator element, and overlaps the vibrating arm in a plan view of the support substrate.

Vibrator device

A frequency adjustment method of a vibrator element includes preparing a vibrator element that has a vibrating arm, a first weight placed on one principal surface of the vibrating arm, and a second weight placed on the other principal surface of the vibrating arm, in which the first weight has a non-overlapping region which does not overlap the second weight in a plan view in a normal direction of the principal surface, preparing a substrate including a wiring portion, and fixing the vibrator element to the substrate by causing the other principal surface side of the vibrator element to face the substrate side, and irradiating the non-overlapping region of the first weight with an energy ray from one principal surface side, removing a portion of the non-overlapping region of the first weight, and adjusting a resonance frequency of the vibrating arm.

Frequency adjustment method of vibrator element

A frequency adjustment method of a vibration element includes adjusting a resonance frequency of the vibration element by irradiating the vibration element, which includes a vibrating arm having a first principal surface and a second principal surface that are in a front and back relationship with each other with an energy ray, to remove a part of the vibrating arm on the first principal surface, and in which an activation amount by the energy ray on the second principal surface of the vibrating arm is smaller than an activation amount by the energy ray on the first principal surface of the vibrating arm.

Frequency adjustment method of vibration element, manufacturing method of vibration element, vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, vehicle

A control device connected to an inertial sensor having temperature characteristics, the control device including a memory for storing temperature compensation information, and update history information, an update determination circuit for determining the necessity of a temperature compensation information update based on a signal that is based on an output signal of a temperature sensor and the update history information, a rest determination circuit for determining whether the inertial sensor is at rest, and an updating circuit for updating the temperature compensation information based on the determination of the update determination circuit, the determination of the rest determination circuit, a signal based on an output signal of the inertial sensor, and the signal based on the output signal of the temperature sensor.

Inertial sensor element control device, inertial sensor, electronic apparatus, vehicle and method of updating temperature compensation information of inertial sensor element control device

A circuit for an angular velocity sensor as a circuit for a physical quantity sensor according to an embodiment of the invention includes a drive circuit that generates a drive signal that drives a driver to vibrate and a switch circuit that switches a state in which a detector that outputs a detection signal in accordance with a physical quantity is electrically continuous with the drive circuit or a state in which the detector is not electrically continuous with the drive circuit to the other state.

Circuit for physical quantity sensor, physical quantity sensor, and method for manufacturing physical quantity sensor

A method for inspecting a physical quantity sensor includes: applying a test drive signal while changing a voltage level, to an angular velocity sensor as a physical quantity sensor having a detection portion which performs detection vibration according to a physical quantity; detecting an output signal from the detection portion corresponding to the test drive signal, as a test detection signal; and performing pass/fail determination based on a change in the test detection signal in relation to the change in the voltage level.

Method for inspecting physical quantity sensor and method for manufacturing physical quantity sensor

A physical quantity sensor includes: a sensor element which detects predetermined physical quantity; a driving circuit which generates a driving signal of the sensor element; and an AGC circuit which controls the driving signal at a constant level according to a reference voltage, based on an output signal of the sensor element, in which the reference voltage is variable.

Physical quantity sensor, electronic device, and moving object

A signal processing circuit includes an I/V conversion circuit (current/voltage conversion section) that converts an oscillation current of a vibrator into a voltage, an RC filter (phase shift section) that shifts a phase of the output signal of the I/V conversion circuit, a full-wave rectifier (part of a drive amplitude control section) that binarizes a signal that has been shifted in phase to generate a switch control signal, a comparator (reference signal generation section) that generates a reference signal for synchronous detection based on the output signal of the I/V conversion circuit, and an EXOR circuit (clock signal generation section) that generates a clock signal for a switched capacitor filter (SCF) that has a frequency twice a frequency of a drive signal based on a phase difference between the reference signal and the switch control signal.

Signal processing circuit, physical quantity detection apparatus, angular velocity detection apparatus, integrated circuit device, and electronic instrument

A detection circuit includes a synchronous detection circuit (synchronous detection section) that synchronously detects a signal that includes a detection signal of a vibrator (an output signal of an amplifier), a switched capacitor filter (SCF) circuit that filters a signal that has been synchronously detected by the synchronous detection circuit (an output signal of a programmable gain amplifier), and an output buffer that buffers and outputs a signal that has been filtered by the SCF circuit, the gain of the SCF circuit being larger than 1.

Detection circuit, physical quantity detection apparatus, angular velocity detection apparatus, integrated circuit device, and electronic instrument

A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.

Composite sensor and electronic device

A vibrating element includes: a first support portion and a second support portion; a first vibrating arm which extends along a first axis, one end of the first vibrating arm being connected to the first support portion; a second vibrating arm which extends along the first axis, one end of the second vibrating arm being connected to the second support portion; an oscillating member which is sandwiched between the other ends of the first vibrating arm and the second vibrating arm, and has openings; and detection arms which extend along a second axis perpendicular to the first axis from the inner walls of the openings of the oscillating member in plan view.

Growing community of inventors

Shiojiri, Japan

Masahiro Oshio