Hokuriku Seikei Industrial Co., Ltd.

Tokyo Electron Limited

Tohoku University

Nippon Tungsten Co., Ltd.

Other

G-Active Co., Ltd.

Ltd. Tsudakoma Corp.

Masahiro Okesaku

Michito Miyahara

Tadahiro Ohmi

Tetsuya Goto

Kiyotaka Ishibashi

Toshihisa Nozawa

Takaaki Matsuoka

Atsutoshi Inokuchi

Hideo Eto

Makoto Saito

Hiroshi Sanda

Tooru Nakagawa

Ryosuke Ataka

Shinya Baba

Yukio Okudo

Ikuo Takashima

A silicon carbide member for a plasma processing apparatus is obtained by mixing an &#x3b1;-silicon carbide powder having an average particle size of 0.3 to 3 &#x3bc;m, with an amount of metal impurities in the &#x3b1;-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising BC in amount of 0.5 to 5 weight parts or AlOand YOin total amount of 3 to 15 weight parts; sintering a mixture of the &#x3b1;-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.

Silicon carbide member for plasma processing apparatus

A shower plate is disposed in a processing chamber in a plasma processing apparatus, and plasma excitation gas is released into the processing chamber so as to generate plasma. A ceramic member having a plurality of gas release holes having a diameter of 20 &#x3bc;m to 70 &#x3bc;m, and/or a porous gas-communicating body having pores having a maximum diameter of not more than 75 &#x3bc;m communicating in the gas-communicating direction are sintered and bonded integrally with the inside of each of a plurality of vertical holes which act as release paths for the plasma excitation gas.

Shower plate sintered integrally with gas release hole member and method for manufacturing the same

The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 &#x3bc;m to 100 &#x3bc;m, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.

Nozzle member and process for producing the same

Provided is a golf swing training apparatus suited to strengthen target muscles in various body regions necessary for golf swings, and train a proper swing form. The apparatus is designed to, when a user performs a golf swing motion while grasping a grip of a golf swing mechanism whose height position is adjustable depending on a body height of a user, allow the grip to be moved along an arc, and transmit the arc movement of the grip from a swing-arm holder to a weight-arm holder to which a weight arm is fixed, through a swing-power transmission shaft, so as to swingingly move the weight arm about an axis of the weight-arm holder to allow a weight member on the weight arm to act as a load countering golf swing power. The apparatus has a mechanism capable of allowing the load based on the weight member fastened to the weight arm to be arbitrarily adjusted depending on individual differences in muscle strength.

Golf swing training apparatus

Occurrence of a back-flow of plasma or ignition of gas for plasma excitation in a longitudinal hole portion can be prevented more completely, and a shower plate in which efficient plasma excitation is possible is provided. In shower plate, which is arranged in processing chamberof a plasma processing apparatus and discharges gas for plasma excitation into processing chamber, porous-gas passing bodyhaving a pore that communicates in the gas flow direction is fixed onto longitudinal holeused as a discharging path of gas for plasma excitation. The pore diameter of a narrow path in a gas flowing path formed of a pore, which communicates to porous-gas passing body, is 10 &#x3bc;m or lower.

Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method

The straightness of the piston of a water jet loom plunger pump for discharging water under a high pressure is maintained to allow its smooth movement with respect to the cylinder. For this, a roller guide is arranged at a reciprocal piston actuating mechanism unit. By forming a bent tube at a water discharging passage from the cylinder to a conduit, moreover, the resistance to the water to be discharged from the cylinder is reduced. The piston is given a degree of freedom to move with respect to a drive member connected to a pump cam and a lever. This enables the piston to move with the least resistance in the cylinder.

Plunger pump for water jet loom

Sub-nozzle in an air injection type weaving machine

A picking device for a water-jet loom comprises a nozzle body connected to a pressurized water source and provided with a plurality of axial nozzle holes, a plurality of spools fitted respectively in the axial nozzle holes and each provided with an axial through-hole through which to pass a weft yarn, a spool driving mechanism for individually or sequentially driving the spools for axial reciprocation or for turning alternately in opposite directions within a fixed angular range, and orifice chips having orifices defining straightening spaces for straightening the flow of the pressurized water around the front ends of the spools together with the circumferences of the front ends of the spools. A fluid passage connected to each of the orifices can be opened and closed by axial reciprocation or by turning alternately in opposite directions in the given angular range of the spool. The spools may be fixedly fitted in the axial nozzle holes, and the fluid passages connected respectively to the orifices may be opened and closed by a valve mechanism driven by a valve driving mechanism.

Picking device with selected spools for a water-jet loom

Water jet nozzle for loom

Auxiliary sub-nozzle for fluid jet loom

Growing community of inventors

Komatsu, Japan

Masahiro Okesaku