Hitachi, Ltd.

Hitachi-high-technologies Corporation

Masahiro Ohashi

Hiroyuki Tanaka

Takeiki Aizono

Makoto Kogure

Dai Fujii

Tadanobu Toba

Katsunori Hirano

Masashi Wada

A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.

Test apparatus

In a distributed control system in which a plurality of nodes are connected to a transmission line, each node controlling components connected to this node and transmitting a message to other nodes, a message sent by each node includes at least two message-sending condition-identifying portions, one of the condition-identifying portions including data indicating a message-receiving node or non-designation of a message-receiving node; and a comparison-selection circuit provided in each node includes registration parts for registering data of message-receiving conditions, at least two registration parts for comparing contents of the condition-identifying portion in the taken-in message with the data of message-receiving conditions registered in the registration parts, a received-message storing part for storing a message to be received in this node, a control part for determining whether or not the taken-in message is to be received in this node based on a result of comparison-processing performed in the comparison and selection means and for transferring the taken-in message to the received-message storing part if it is determined that the taken-in message is received in this node, otherwise, abandoning the taken-in message.

Distributed control system and filtering method used in the distributed control system

In a distributed control system with a plurality of nodes connected to a transmission line, each node controlling components and transmitting a message to other nodes, a message includes at least two message-sending condition-identifying portions, one of the portions including data indicating a message-receiving node or non-designation of a message-receiving node. A comparison-selection circuit in each node includes at least two registration parts for comparing contents of the condition-identifying portion in the taken-in message with the data of message-receiving conditions registered in the registration parts, a received-message storing part for storing a message to be received, a control part for determining whether or not the taken-in message is to be received based on a result of comparison-processing performed in the comparison and a selector transferring the taken-in message to the received-message storing part if it is determined that the taken-in message is to be received, otherwise, abandoning the taken-in message.

Growing community of inventors

Hitachinaka, Japan

Masahiro Ohashi