Aera Japan Ltd.

Masahiro Nambu

Isamu Komiya

An exhauster pressure control system capable of keeping the gas pressure constant regardless of variation in the flow rate of the gas to be controlled. An inlet port,and an outlet port,are formed in a main body,and a spool,is held against sliding surfaces,and,by a spring,. A pilot chamber,is located below the spool,and an internal pressure of the pilot chamber is held above a gas pressure at the inlet port,. A pressure sensor S to detect the gas pressure at the inlet port,, a control valve V to supply regulating gas to the pilot chamber,and a control circuit C to drive the control valve V according to an output of the pressure sensor are provided outside the main body,, wherein the gas pressure at the inlet port,as detected by the pressure sensor S is fed back to the control circuit C, thereby actuating the control valve V to supply regulating gas to the pilot chamber.

Exhauster pressure control system

A flow control valve for a semiconductor manufacturing process, which valve utilizes a pressure sensor between the flow control valve and a subsequent sonic nozzle to detect the gas pressure which is fed back to the valve to control the flow through the valve.

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Omiya, Japan

Masahiro Nambu