Hitachi-kokusai Electric Inc.

Kokusai Electric Corporation

Masahiro Miyake

Shinya Morita

Naonori Akae

Masato Terasaki

Kosuke Takagi

Keishin Yamazaki

Yasuaki Komae

Naoki Matsumoto

Akinori Tanaka

Shinji Yashima

Hiroshi Ashihara

Takafumi Sasaki

Takatomo Yamaguchi

Yukinori Aburatani

Hidehiro Yanai

Shin Hiyama

Tomihiro Amano

Toshiya Shimada

Kenji Shinozaki

According to one aspect of the technique, there is provided a method of manufacturing a semiconductor device, including checking a leak from a process furnace before a substrate is processed. The checking includes: (a) measuring, by a partial pressure sensor provided at an exhaust pipe, an oxygen partial pressure value of a residual oxygen after the process furnace is vacuum-exhausted; (b) comparing the oxygen partial pressure value measured by the partial pressure sensor with a threshold value; and (c) when the oxygen partial pressure value is higher than the threshold value in (b), performing at least one among: purging the process furnace and evacuating the process furnace.

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium

Return nozzle

Reaction tube

A substrate processing apparatus capable of increasing the life span of a lamp for heating a substrate is provided. The substrate processing apparatus includes: a light receiving chamber for processing a substrate; a substrate support unit inside the light receiving chamber; a lamp including an electrical wire, and a seal accommodating the electrical wire to hermetically seal the lamp with a gas therein, the lamp irradiating the substrate with a light; a lamp receiving unit outside the light receiving chamber to accommodate the lamp therein, the lamp receiving unit including a lamp connector connected to the lamp to supply an electric current through the electrical wire, a heat absorption member including a material having a thermal conductivity higher than that of the seal, and a base member fixing the heat absorption member; and an external electrical wire connected to the lamp connector to supply current to the lamp connector.

Substrate processing apparatus and method of manufacturing semiconductor device

Growing community of inventors

Toyama, Japan

Masahiro Miyake