Mitsui Minings & Melting Co., Ltd.

Masahiro Koide

Yoshinori Matsuura

Rintaro Ishii

Shoji Imaura

Yasuhiro Seto

Yukiko Kitabatake

Provided is a carrier-attached metal foil which can suppress the number of foreign matter particles on the surface of a metal layer to enhance circuit formability, and can keep stable releasability even after heating at a high temperature of 240° C. or higher (for example, 260° C.) for a long period of time. The carrier-attached metal foil includes a carrier, a release functional layer provided on the carrier, the release functional layer including a metal oxynitride, and a metal layer provided on the release functional layer.

Metal foil with carrier

An yttrium oxyfluoride is represented by YOF and is stabilized by a fluoride represented by CaF. Preferably, the number of moles of Ca with respect to 100 mol of yttrium is from 8 to 40 mol. A powder material is made of a first powder mixture including a calcium fluoride powder represented by CaFand an yttrium oxyfluoride powder represented by YOF, or a second powder mixture including a calcium fluoride powder represented by CaF, an yttrium fluoride powder represented by YF, and an yttrium oxide powder represented by YO. A production method involves firing a molded product of the first or second powder mixture under predetermined conditions.

Yttrium oxyfluoride, starting material powder for production of stabilized yttrium oxyfluoride, and method for producing stabilized yttrium oxyfluoride

Growing community of inventors

Omuta, Japan

Masahiro Koide