Tokyo Electron Limited

Furuya Metal Co., Ltd.

Masahiro Kobayashi

Harunari Hasegawa

Michihiro Takahashi

Yoshihisa Kumagai

Hisashi Inoue

Hiroshi Kikuchi

Tamotsu Hatakeyama

Tatsuya Yamaguchi

Koji Yoshii

Yasuaki Kikuchi

Mitsuru Obara

Kensuke Morita

Keishi Shionaga

Norio Baba

Daisuke Yamanaka

Jun Itabashi

A thermocouple structure according to one aspect of the present disclosure includes a first element wire, second element wires formed of a material different from the first element wire, an insulating covering member covering at least one of the first element wire and the second element wires, and a protective tube accommodating the first element wire and the second element wire. Each of the second element wires is bonded to a different position on the first element wire.

Thermocouple structure, heat treatment apparatus, and method of manufacturing thermocouple structure

Cart

Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift.

Assembling apparatus and assembling method for semiconductor manufacturing apparatus

A method for conveying a reaction tube unit including a vertical reaction tube and a gas supply pipe provided at a distance from an inner wall of the vertical reaction tube along a longitudinal direction thereof, the method includes: arranging a buffer inside the reaction tube between the inner wall and the gas supply pipe to alleviate a collision; placing the reaction tube unit attached with the buffer on a carriage via a vibration isolator; and conveying the reaction tube unit by moving the carriage.

Method for conveying reaction tube unit

The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.

Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus

Growing community of inventors

Iwate, Japan

Masahiro Kobayashi