Ricoh Company, Ltd.

Masahiro Ishimori

Masaru Shinkai

Satoshi Mizukami

Osamu Machida

Shuya Abe

Atsushi Takeuchi

Takahiko Kuroda

Toshiaki Masuda

Takuma Hirabayashi

Yoshikazu Akiyama

Akira Shimofuku

Kanshi Abe

Keiji Ueda

Manabu Nishimura

Tsutoh Aoyama

An electromechanical transducer element includes a first electrode on a substrate, an electromechanical transducer film on the first electrode, and a second electrode on the electromechanical transducer film. The electromechanical transducer film includes a thin line pattern. The thin line pattern includes a plurality of thin lines that are spaced away from each other.

Electromechanical transducer element, method of producing the element, liquid discharge head incorporating the element, and liquid discharge apparatus incorporating the head

There is provided a method of producing an electromechanical transducer that includes a plurality of electromechanical transducer elements on a substrate. The method includes forming a plurality of individual electrodes corresponding to the plurality of electromechanical transducer elements on the substrate, forming an insulation film to cover the plurality of individual electrodes on the substrate, forming a conductive film on the insulation film, forming a plurality of openings to expose the plurality of individual electrodes in each of the insulation film and the conductive film, and forming a plurality of electromechanical transducer films on the plurality of individual electrodes exposed in the plurality of openings.

Methods of producing electromechanical transducer, sensor, and actuator

An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.

Electromechanical transducer element, method for producing electromechanical transducer element, liquid ejecting head, liquid ejecting unit, and apparatus for ejecting liquid

A piezoelectric thin film element includes a substrate, a vibration plate provided on the substrate, a lower electrode provided on the vibration plate, the lower electrode including at least a platinum metal film or an iridium metal film, a piezoelectric film provided on the lower electrode, the piezoelectric film including a polycrystalline body, and an upper electrode provided on the piezoelectric film, the lower electrode being provided on an upper portion of a titanium oxide film formed on the vibration plate, the lower electrode including a platinum metal film or an iridium metal film formed on the titanium oxide film and conductive oxide formed on the platinum metal film or the iridium metal film, and the platinum metal film or the iridium metal film being a precise film.

Piezoelectric thin film element, inkjet recording head, and inkjet image-forming apparatus

An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2&#x3b8; at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by &#x3b8;-2&#x3b8; measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.

Electromechanical conversion element, liquid drop discharge head and image forming apparatus

An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2&#x3b8;-&#x3c9; scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle &#x3b8;. The full width at half maximum is not greater than 10 degrees.

Electromechanical transducer, droplet ejection head, and method for manufacturing electromechanical transducer

An electromechanical conversion element for converting an electric signal into mechanical displacement or converting mechanical displacement into an electric signal, includes a bottom electrode in which an alumina film, a metal film, and a conductive oxide film are sequentially laminated; an electromechanical conversion film disposed on the conductive oxide film of the bottom electrode; and a top electrode disposed on the electromechanical conversion film, wherein the metal film is solid.

Electromechanical conversion element, manufacturing method thereof, piezoelectric type actuator, liquid droplet jetting head, and inkjet recording apparatus

A piezoelectric thin film element includes a vibration plate, a lower electrode provided on the vibration plate and made of a conductive oxide, a piezoelectric thin film provided on the lower electrode and made of a polycrystalline substance, and an upper electrode provided on the piezoelectric thin film, wherein the lower electrode includes a titanium oxide film formed on the vibration plate, a platinum film formed on the titanium oxide film, and a conductive oxide film formed on the platinum film and, the platinum film and the conductive oxide film being a solid film with no holes.

Piezoelectric thin film element and method of manufacturing the same, droplet discharge head and inkjet recording device using the piezoelectric thin film element

Disclosed is an electromechanical conversion element, including an electromechanical conversion film including a PZT, an upper electrode formed on a top of the electromechanical conversion film and including a first strontium ruthenium oxide, and a lower electrode formed on a bottom of the electromechanical conversion film and including a second strontium ruthenium oxide, wherein Sr-pzt/Sr-sr&#x2266;0.01, wherein Sr-pzt is a SIMS intensity for a secondary ion of strontium of the PZT at a position of &#xbd; of a thickness of the electromechanical conversion film and Sr-sr is a SIMS intensity for a secondary ion of strontium of the second strontium ruthenium oxide at a position of &#xbd; of a thickness of the lower electrode.

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Tokyo, Japan

Masahiro Ishimori