Seiko Epson Corporation

Masahiro Ishii

Takayuki Kikuchi

Keiichi Yamaguchi

Takashi Yamazaki

Takeo Funakawa

A vibrator element has a detection arm that performs a drive vibration in a Z-axis direction, and performs a detection vibration in an X-axis direction when an angular velocity is applied thereto The vibrator element also has first, second, third, and fourth electrode portions and first, second, third, and fourth ground electrode portions provided on a detection arm. Further, a signal generated between the first electrode portion and the first ground electrode portion and a signal generated between the second electrode portion and the second ground electrode portion are in opposite phase in a drive vibration and in phase in a detection vibration. Furthermore, a signal generated between the third electrode portion and the third ground electrode portion and a signal generated between the fourth electrode portion and the fourth ground electrode portion are in opposite phase in the drive vibration and in phase in the detection vibration.

Physical quantity detection vibrator element, physical quantity detection apparatus, electronic apparatus, and moving object

A vibrating element includes a base part, drive arms containing first surfaces and second surfaces having front-back relations with the first surfaces, having groove portions provided on the first surface sides, and extended from the base part in extension directions, and drive parts provided to contain piezoelectric layers on the second surfaces, and section shapes of the drive arms orthogonal to the extension directions contain asymmetric section shapes with respect to virtual center lines passing through centers of widths in directions orthogonal to the extension directions.

Vibrating element, vibrating device, electronic apparatus, and moving object

A vibrator (electronic device) includes: a vibrator element including vibrating arms; a base portion supporting the vibrator element and having a rectangular shape in a plan view; and a lid provided on the side of the vibrator element opposite to the base portion. Extending directions of long and short sides of the base portion and an extending direction of the vibrating arms cross each other. When an angle formed by the vibrating arms and a Y-axis direction is &#x3b8;, the angle &#x3b8; is more than 0&#xb0; and less than 90&#xb0;.

Electronic device, electronic apparatus, and moving object

A vibrating element includes a vibration portion including a first main surface, a second main surface, a first side surface, and a second side surface, and extending in a first direction. The vibration portion includes a first groove formed in the first main surface and a second groove formed in the second main surface, and in a plan view seen from a direction perpendicular to the first main surface, the first groove and the second groove are provided to shift in opposite directions from each other, in a second direction.

Vibrating element, angular velocity sensor, electronic apparatus, and moving object

A gyro sensor includes a base, a first connection arm and a second connection arm that extend from the base in opposite directions along an X axis, a first drive oscillation arm that extends from the first connection arm along a Y axis, a second drive oscillation arm that extends from the second connection arm along the Y axis, and a first detection oscillation arm and a second detection oscillation arm that extend from the base in opposite directions along the Y axis, and each of the first drive oscillation arm and the second drive oscillation arm has an oscillation component along the X axis and an oscillation component along a Z axis.

Gyro sensor and electronic apparatus

A resonator element includes: three or more resonating arms, each of the resonating arms including; a lower electrode provided on a first surface of the resonating arm, a piezoelectric film formed on the lower electrode, an upper electrode formed on the piezoelectric film, a first wiring line coupled to the lower electrode, and a second wiring line coupled to the upper electrode; and a base to which the resonating arms are connected. In the resonator element, the resonating arm vibrates in a thickness direction of the resonating arm. The resonating arms adjacent to each other vibrate in opposite directions from each other. The first surface is opposed to a second surface in the thickness direction. The second wiring line is drawn out to the second surface through side surfaces of the resonating arm so as to surround the resonating arm.

Growing community of inventors

Suwa, Japan

Masahiro Ishii