Sharp Kabushiki Kaisha Corporation

Masahiro Ichihara

Shinichi Kawato

Takashi Ochi

Yuhki Kobayashi

Eiichi Matsumoto

Satoshi Inoue

Katsuhiro Kikuchi

Kazuki Matsunaga

Yuto Tsukamoto

Manabu Niboshi

Yoshiyuki Isomura

The present invention provides a vapor deposition device including a novel alignment mechanism applicable to a large substrate, a vapor deposition method, and a method for manufacturing an organic electroluminescence element. The vapor deposition device of the present invention is a vapor deposition device for performing vapor deposition while transporting a substrate in a first direction, and includes: a mask; a substrate tray including a substrate-holding portion and a guide portion protruding from the substrate-holding portion to the mask side and disposed along the first direction; at least one distance meter disposed on a first end which is one end of the mask or the guide portion; and at least one driver coupled with a second end which is the other end of the mask. The at least one distance meter is configured to measure a distance between the at least one distance meter and the guide portion or the first end when the guide portion faces the first end. The at least one driver is capable of driving the mask in a second direction perpendicular to the first direction based on the measured value of the at least one distance meter.

Vapor deposition device, vapor deposition method, and method for manufacturing organic electroluminescence element

A vapor deposition unit () includes a vapor deposition mask (), a vapor deposition source (), and a limiting plate unit (). The limiting plate unit () includes (i) a plurality of first limiting plates () separated from each other in an X axis direction and (ii) a plurality of second limiting plates () disposed directly above the first limiting plates () in a plan view and separated from each other in the X axis direction. At least two second limiting plates () are arranged in the X axis direction for each first limiting plate ().

Restricting plate unit, vapor deposition unit, and vapor deposition device

In an organic EL element including a positive electrode, a negative electrode, and a light emitting layer (recombination layer) provided between the positive electrode and the negative electrode, an electron transport layer and an electron injection layer are provided between the light emitting layer and the negative electrode, and are sequentially arranged in the direction from the light emitting layer to the negative electrode. A hole injection layer and a hole transport layer are provided between the light emitting layer and the positive electrode, and are sequentially arranged in the direction from the positive electrode to the light emitting layer. A buffer layer for suppressing the electron trapping properties is provided between the light emitting layer and the hole transport layer.

Organic element

The present invention relates to a vapor deposition device for forming a film on a substrate, including: a vapor deposition chamber; a vapor deposition unit including a vapor deposition mask provided with an opening for pattern formation; and a transport mechanism that is configured to transfer at least one of the substrate and the vapor deposition unit relative to the other in a first direction perpendicular to the normal direction of the vapor deposition mask and that is configured to cause the substrate to rest temporarily at a resting position relative to the vapor deposition unit. The substrate includes a vapor-deposition-target region, and the region does not overlap the opening of the vapor deposition mask when the substrate is at the resting position. The vapor deposition chamber is provided with a first vent and a second vent.

Vapor deposition device, vapor deposition method, and organic electroluminescence element manufacturing method

A mask for a vapor deposition apparatus includes an outer frame; a first bar disposed on an inner side of the outer frame and fixed to the outer frame; and a pattern forming portion disposed on the outer frame and the first bar and fixed to the outer frame. The pattern forming portion includes a plurality of mask openings for pattern formation. Each of the plurality of mask openings is disposed along a first direction. The plurality of mask openings are disposed in a second direction orthogonal to the first direction. The first bar is positioned between adjacent two mask openings among the plurality of mask openings when viewed along a third direction orthogonal to the first direction and the second direction, and is in contact with the pattern forming portion.

Mask for vapor deposition apparatus, vapor deposition apparatus, vapor deposition method, and method for producing organic electroluminescence element

The vapor deposition apparatus employs scanning vapor deposition, and includes a limiting component including a first plate portion; a second plate portion provided with a space from the first plate portion; and a joint portion combining the first plate portion with the second plate portion, the first plate portion being provided with an first opening, the second plate portion being provided with an second opening that faces the first opening, the vapor deposition apparatus including a first space between the first opening and the second opening, the vapor deposition apparatus including a second space between the first plate portion and the second plate portion, the first space being connected to the second space, the vapor deposition apparatus including a third space that is in the outside of the limiting component, the second space being connected to the third space.

Vapor deposition apparatus, vapor deposition method, and method for producing organic electroluminescent element

The present invention provides a method for producing an organic EL element capable of shortening the film formation time while suppressing an increase in the blur width; and an organic EL display device. The method is for producing an organic EL element by scanning vapor deposition, in which one or more vapor deposition sources each are provided with ejection orifices that face the respective openings of a limiting plate, and the ejection orifices facing the same opening are spaced from each other to give a sum of distributions.

Method for producing organic electroluminescent element, and organic electroluminescent display device

The present invention provides a vapor deposition apparatus capable of preventing abnormal film formation due to scattering in vapor deposition streams; and a method for producing an organic electroluminescent element which includes forming a patterned thin film with the vapor deposition apparatus. The present invention relates to a vapor deposition apparatus that includes a vapor deposition source equipped with a nozzle that ejects vapor deposition particles; an integrated limiting plate equipped with a first limiting plate including an opening that is in front of the nozzle, and with second limiting plates placed in the opening in the first limiting plate; and a mask including slits. The present invention also relates to a method for producing electroluminescent elements that includes a vapor deposition step of forming a patterned thin film with the vapor deposition apparatus.

Vapor deposition apparatus and method for producing organic electroluminescent element

The present invention provides a display device which inhibits deterioration in display quality caused by color mixture of luminescent layers. In a case where vapor deposition particles are deposited onto a substrate, P+2Lc&#x2267;{(Ts&#xd7;M+0.96&#xd7;G&#xd7;Wn)/(Ts&#x2212;G)}+2Dm and 3 &#x3bc;m&#x2266;Dm &#x2266;5 &#x3bc;m are satisfied, where 'M' is a width of a mask opening, 'Wn' is a width of an injection hole, &#x201c;G&#x201d; is a distance between the TFT substrate and a vapor deposition mask, &#x201c;Ts&#x201d; is a distance between the TFT substrate and a vapor deposition source, &#x201c;P&#x201d; is a width of a first pixel opening, and &#x201c;Lc&#x201d; is a width of a non-display region.

Method for manufacturing display device

The vapor deposition device includes a plurality of vapor deposition masks whose lengths in Y axis and X axis directions are shorter than those of a film formation target substrate. Vapor deposition masks adjacent to each other in the Y axis direction is positionally displaced in the X axis direction. In an overlapping area in which mask opening group areas adjacent to each other in the Y axis direction overlap with each other in the X axis direction, opening lengths in the Y axis direction become shorter toward the outer side of each of the mask opening group areas in the plan view.

Growing community of inventors

Mitsuke, Japan

Masahiro Ichihara