Hitachi High-Tech Corporation

Mitsubishi Electric Building Techno-Service Co., Ltd.

Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Electric Corporation

Masahiro Fukuta

Yoshihiko Kinpara

Kazuhiro Honda

Akira Ikegami

Noriaki Arai

Takahiko Kobayashi

Keigo Kasuya

Yuta Kawamoto

Takumi Oonuma

An electron guncapable of suppressing an uneven temperature distribution at an extraction electrode and a length-measuring SEMare provided. The electron gunis equipped with: a charged particle source; an extraction electrodefor extracting charged particles from the charged particle sourceand allowing some of the charged particles to pass while blocking some other charged particles; and an auxiliary structuredisposed in contact with the extraction electrode. The length-measuring SEMis equipped with the electron gunand a computer systemfor controlling the electron gun

Charged particle gun and charged particle beam system

A charged particle source is provided that exhibits small energy dispersion for charged particle beams emitted under a high angular current density condition and allows stable acquisition of large charged particle currents even for a small light source diameter. The charged particle source has a spherical virtual cathode surface from which charged particles are emitted, and the virtual cathode surface for charged particles emitted from a first position on a tip end surface of an emitter and the virtual cathode surface for charged particles emitted from a second position on the tip end surface of the emitter match each other.

Charged particle source and charged particle beam device

The purpose of the present invention is to provide a charged particle source that exhibits small energy dispersion for charged particle beams emitted under a high angular current density condition and allows stable acquisition of large charged particle currents even for a small light source diameter. The charged particle source according to the present invention has a spherical virtual cathode surface from which charged particles are emitted, and the virtual cathode surface for charged particles emitted from a first position on a tip end surface of an emitter and the virtual cathode surface for charged particles emitted from a second position on the tip end surface of the emitter match each other (see FIG.).

To provide a charged particle beam device capable of preventing generation of geometric aberration by aligning axes of electrostatic lenses with high accuracy even when center holes of respective electrodes which constitute the electrostatic lens are not disposed coaxially. The charged particle beam device according to the invention includes an electrostatic lens disposed between an acceleration electrode and an objective lens, wherein at least one of the electrodes which constitutes the electrostatic lens is formed of a magnetic body, and two or more magnetic field generating elements are disposed along an outer periphery of the electrode.

Charged particle beam device and electrostatic lens

A control device for a rotating machine driving an elevator suppresses increases in the moving time of the elevator while securing control and stability in accordance with moving direction and load of a car of the elevator. A control device for controlling speed of the rotating machine without using a speed sensor includes a speed command signal generator for generating a rotational speed command for the rotating machine; and a speed sensor-less controller for controlling a voltage applied to the rotating machine without using a speed sensor, based on the rotational speed command from the speed command signal generator. In the control device, the speed command signal generator changes an acceleration running curve in a deceleration interval in accordance with the moving direction and the load of the car of the elevator to generate the rotational speed command.

Control device without a speed sensor for controlling speed of a rotating machine driving an elevator

In an apparatus measuring constants of an induction motor, an inverter converts an inputted voltage command signal into a single-phase AC power and feeds the single-phase AC power to the induction motor, and a currert detector detects a current of the single-phase AC power fed to the induction motor. An apparatus controller generates a voltage command signal corresponding to an AC voltage as applied to the induction motor and outputs the voltage command signal to the inverter and gerates the voltage command signal and controls the inverter to feed the single-phase AC power having a frequency selected in a range equal to or higher than 0.006 Hz and equal to or lower than 1.5 Hz to the induction motor. A constant calculation controller calculates constants of the induction motor based on the voltage and current of the single-phase AC power fed to the induction motor.

AC rotary machine constant measuring apparatus for measuring constants of stationary AC rotary machine

A device for determining a constant of a rotating machine includes: a test number selector outputting a test number n, selected from 1 to N (N&#x2267;2), and outputting a phase signal q determined by a predetermined condition that is previously set based on the test number n; a tester for supplying an alternating voltage to the rotating machine induction machine based on the test number n and the phase signal q and outputing a reference phase gain and a 90-degree-delay phase gain based on values of the phase signal q corresponding to 1 to N of the test number n; and a rotating machine constant calculator receiving the reference phase gain and the 90-degree-delay phase gain and then calculating a constant of the rotating machine using the reference phase gain and the 90-degree-delay phase gain.

Growing community of inventors

Tokyo, Japan

Masahiro Fukuta