University of California

Masahiro Araki

Srinivas Gandrothula

Takeshi Kamikawa

An epitaxial lateral overgrowth (ELO) layer is grown on an opening area of a substrate, wherein the ELO layer is higher than a surfaceof a trench in the substrate. The trench is apt to form a symmetric shape of the ELO layer, which renders it suitable for flip-chip bonding The shape of the ELO layer has a depressed surface region at a back side of a bar formed by the ELO layer. A cleaving point is located higher than the bottom of the ELO layer, so that a force can be efficiently applied tothe cleaving point for removing the bar.

Growing community of inventors

Santa Barbara, CA, United States of America

Masahiro Araki