Fujikin Inc.

Masahiko Takimoto

Kouji Nishino

Nobukazu Ikeda

Toshihide Yoshida

Tsutomu Shinohara

Masaaki Nagase

Kenta Kondo

Kaoru Hirata

Tomohiro Nakata

Katsuyuki Sugita

Kazuteru Tanaka

Hidenobu Sato

Takahiro Imai

Masayoshi Kawashima

Ryousuke Dohi

Ryutaro Tanno

Yohei Sawada

Kenji Aikawa

Shinya Ogawa

Yuya Suzuki

Satoru Yamashita

Masahiko Nakazawa

Takeru Miura

Daihi Tsuchiguchi

A fluid control devicecomprises a valve device Vincluding actuatorsandfor opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V, and a control circuitconnected to the valve device Vand the pressure sensor PT, and the control circuitcontrols an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Fluid control device, fluid supply system, and fluid supply method

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, a first light-transmission memberfor transmitting light from the light source to the measurement cell, a second light transmission memberfor transmitting light from the measurement cell to the photodetector, a lensA provided in the fluid unit, the lensA being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensorfor measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuitfor detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.

Density measurement device

A Concentration measurement devicecomprises: a measurement cellhaving a flow path through which a gas flows, a light sourcefor generating incident light to the measurement cell, a photodetectorfor detecting light emitted from the measurement cell, a pressure sensorfor detecting a pressure of the gas in the measurement cell, a temperature sensorfor detecting a temperature of the gas in the measurement cell, and an arithmetic circuitfor calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient &#x3b1;, wherein the arithmetic circuitis configured to calculate the concentration using the extinction coefficient &#x3b1; determined on the basis of the output of the temperature sensor

Concentration measurement device

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, optical fibersandfor connecting the electric unitand the fluid unitand is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light sourceto the measurement cell and then emitted from the measurement cell by the photodetector, where optical connection partsandconnected to the optical fibersand the light sourceor the photodetectorare integrally provided in the electric unit

A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device

A control unitof a flow rate control systemcomprises: a recording unitfor recording measured values of a pressure sensor P and a temperature sensor T, a storage unitfor storing volume data between a first valve Vand a second valve Vcorresponding to the measured value of the pressure sensor P, and an arithmetic unitfor calculating a flow rate based on a first pressure value Pand a first temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas and then closing the first valve Vand the second valve Vsimultaneously in a state where the gas is flowing; a second pressure value Pand a second temperature value Tmeasured after opening the first valve Vand the second valve Vto flow a gas, closing the second valve Vin a state where the gas is flowing, and then closing the first valve Vafter a predetermined time &#x394;t has elapsed; and a volume value V between the first valve Vand the second valve Vwhich corresponds to the second pressure value P

Flow rate control system and flow rate measurement method

A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.

Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A pressure-type flow rate control device includes a restriction part; a control valve provided upstream of the restriction part; an upstream pressure sensor for detecting pressure between the restriction part and the control valve; and an arithmetic processing circuit connected to the control valve and the upstream pressor sensor. The device is configured to perform flow rate control by controlling the control valve according to an output of the upstream pressure sensor. The arithmetic processing circuit performs an operation of closing the control valve in order to reduce a flow rate of a fluid flowing through the restriction part, and performs an operation of closing the control valve by feedback control in which a target value is an exponential function more gradual than the pressure drop characteristic data when a gas flows out of the restriction part.

Pressure-type flow control device and flow control method

Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.

Valve device

A fluid sealing device and a pressure detector calibration device are provided to enable further reducing of errors between a sealing pressure and a set pressure in a fluid flow path. The fluid sealing device includes a pressure sealing structure having a fluid inlet, a fluid outlet, and a fluid flow path formed therein, a temperature controller, a temperature detector, a pressure detector, an inlet-side on-off valve, an outlet-side on-off valve, a restriction part, a fluid supply device, a fluid sealing controller for sealing the fluid in the pressure sealing structure by controlling the fluid supply device, the inlet-side on-off valve, and the outlet-side on-off valve, wherein the fluid sealing controller opens the outlet-side on-off valve after increasing the pressure in the fluid sealing structure to a primary pressure higher than the set pressure, and closes the outlet-side on-off valve when a value detected from the pressure detector becomes a corrected set pressure by an error correction value corresponding to a temperature detected by the temperature detector at the set pressure.

Fluid sealing device and pressure detector calibration device

A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.

Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus

The fluid controller includes a fluid control module and an external control module. The fluid control module includes a control valve on a flow channel, a valve driver circuit that drives the control valve, a fluid meter on a flow channel, and a first processor that processes a signal output from the fluid meter. The external control module includes a second processor that processes a signal output from the first processor. The second processor outputs a valve control signal according to the signal of the fluid meter output from the first processor, the valve control signal is directly input to the valve driver circuit without through the first processor, and the valve driver circuit outputs a voltage that drives the control valve according to the valve control signal from the second processor.

Fluid control device, method for controlling fluid control device, and fluid control system

A flow rate signal correction method applicable to a pressure-type flow rate control device that controls a flow rate by controlling pressure existing upstream of a restriction part includes a step of generating a primary signal indicating the flow rate in accordance with an output of a pressure sensor provided upstream of the restriction part and a step of generating a secondary signal as a corrected signal of the primary signal such that the current value of the primary signal and a value including information regarding one or a plurality of past values of the primary signal are used to derive a current value corrected according to a predetermined relational expression. The secondary signal is output as a flow rate signal during a stable flow rate period, and the secondary signal is not output as a flow rate signal during a transient change period.

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Osaka, Japan

Masahiko Takimoto