Shimadzu Corporation

Kanegafuchi Kagaku Kogyo Kabushiki Kaisha

Nitto Boseki Co., Ltd.

Masahiko Tai

Yoshihisa Tawada

Takehisa Nakayama

Koji Nakazawa

Toshihito Fujita

Shinichi Fukushi

Eizo Ideno

Nozomu Ikuchi

A glow-discharge decomposition apparatus comprises ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit having at least one electric element. Each of the substrates is provided on the ground electrodes which are placed over each of the RF-electrodes in parallel to each other. Each of the RF-electrodes standing in parallel are electrically insulated to each other. The matching circuit is connected to accept a RF-power from the RF-power supply. The controlling circuit is connected to accept a RF-power from the matching circuit. The outputs of the controlling circuit are connected to supply RF-powers to the RF-electrodes. The films are fabricated on the substrates by supplying RF-powers being independently controlled via the controlling circuit, thereby plasmas are controlled over each of the RF-electrodes. Thus, deposition rates are individually controlled and uniform films are fabricated on each of the substrates.

Glow-discharge decomposition apparatus

An apparatus for winding strand of glass fiber filaments is disclosed. The apparatus comprises at least one takeup collet on which a strand of glass fiber filaments is wound, a guiding mechanism for guiding an end portion of the strand which has started being drawn off from a spinning bushing to a predetermined position below the spinning bushing on a stream of a water, and an auxiliary winder mechanism rotatable for catching and winding the guided end portion of the strand. The auxiliary winder being moved toward said takeup collet when the end portion of the strand is under a condition capable of being transferred onto the takeup collet for bringing the strand into contact with the takeup collet within a winding zone of the takeup collet. An associated method therefor is also disclosed.

Method and apparatus for winding glass fibers

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Kyoto, Japan

Masahiko Tai