Fujikin Inc.

Kokusai Electric Corporation

Connectec Japan Corporation

Fujikin Irc.

Sasada Magnetics and Sensors Laboratory Co., Ltd.

Masahiko Ochiishi

Tsutomu Shinohara

Akihiro Harada

Takahiro Matsuda

Ryutaro Tanno

Yuya Suzuki

Katsunori Komehana

Kenji Aikawa

Mutsunori Koyomogi

Ichiro Sasada

Tomoyuki Ishikawa

Yoshiaki Yamato

Yuji Saiki

Hiroki Karube

Nozomi Shimoishizaka

Hiroshi Unami

Kazutoshi Horikawa

Toru Nebashi

Hidekazu Machida

To enable accurate and simple diagnosis of an operation abnormality of a valve. A valve Vcapable of detecting an operation abnormality has a magnet Mthat is attached in the vicinity of a pressing adapterof a stemthat slides according to an opening/closing operation of the valve V, and a magnetic sensor Mthat is attached to a surface acing the stem, inside the pressing adapterthat presses a peripheral edge of a diaphragm, and detects a change in a distance between the magnet Mand the magnetic sensor M. Further, an abnormality determination mechanism compares the change in the distance between the magnet Mand the magnetic sensor Mat the time of abnormality diagnosis detected by the magnetic sensor Mand a previously measured change in the distance between the magnet M and the magnetic sensor Mat the time of normality, and determines whether or not there is an abnormality.

Valve, abnormality diagnosis method of valve

A tool is equipped with a torque sensor, suited for a tightening task of a fastening component of a device such as a fluid control system that requires a large number of fastening components for assembly and has a narrow space for access to the fastening components, and capable of automatically detecting a tightening torque. The tool includes a torque sensor capable of detecting a tightening torque for tightening a fastening component acting on a bit. The torque sensor initiates measurement of the tightening torque when the tightening torque detected exceeds a set threshold value, completes measurement when the tightening torque detected falls below the set threshold value and a set time elapses, and outputs torque-related data formed on the basis of measurement data from measurement initiation to measurement completion and including a measurement time. The torque-related data includes a peak value of the measurement data.

Tool, task management device, task management method, and task management system

To provide a manual tool excellent in workability and operability and capable of precise tightening torque management, a manual tool includes a grip including a bit holding part that detachably holds a bit, and a torque sensor that is of a magnetostrictive type, and includes a detecting part that is penetrated by the bit held by the bit holding part and surrounds an outer periphery of the bit, the torque sensor is capable of contactlessly detecting a torque acting on the bit, and is detachably provided to the grip. The torque sensor can be configured to be formed so as to be mountable to the grip with the bit mounted to the bit holding part of the grip.

Manual tool, and bit and torque sensor used therefor

A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis. A fluid control deviceand a serverare configured to be able to communicate with each other through networks NWand. The fluid control deviceincludes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device. The serverincludes a determination processing unitthat determines whether the fluid control devicehas an abnormality, an information collection unitthat collects the operation information and an abnormality determination result for the fluid control device, an information storage unitthat stores the operation information and the determination result collected, an information extraction unitthat refers to the information storage unit, and extracts, analysis target including same predetermined operation information and another of the operation information as well as information related to the determination result, selectively for each of a plurality of the fluid control devices, and a correlation analysis unitthat analyzes correlation between a predetermined operation of the fluid control deviceand occurrence of abnormality through comparison using the information extracted.

System, method, and computer program for analyzing operation of fluid control device

To diagnose an abnormality of a fluid control device from an operation of an entire fluid supply line including a plurality of fluid control devices. Provided is an abnormality diagnosis method of a fluid supply line including a plurality of fluid control devices F, V, and Vcommunicating with each other fluid-tightly. The abnormality diagnosis method has: a valve operation step of opening/closing any one or more of a valve FV in a flow rate control device, a valve V, and a valve V; a pressure adjustment step of setting a part or all of flow passages Rand Rleading from the valve Vto the valve Vvia the flow rate control device to a vacuum state or a pressurization state; a pressure detection step of acquiring temporal pressure characteristics in a flow passage of the flow rate control device F by pressure detection mechanisms Pand P; and an abnormality determination step of comparing pressure characteristics at the time of abnormality diagnosis acquired by the pressure detection mechanisms Pand Pand pressure characteristics at the time of normality measured in advance under the same conditions, and determining whether or not there is an abnormality.

Abnormality diagnosis method of fluid supply line

The present invention is intended to improve the accuracy of control of a material gas by providing a valve with simplified wiring and a fluid supply line equipped with the valve. A valve V includes a valve bodyand a driving pressure control devicecoupled to the valve body. The driving pressure control deviceincludes: a driving pressure introduction pathconnected to a driving pressure supply source G outside a line; an automatic valvethat opens and closes the driving pressure introduction path; a driving pressure introduction paththat couples to a driving pressure introduction portof the valve body; an automatic valvethat opens and closes the driving pressure introduction pathin conjunction with the automatic valveand opens and closes an exhaust passagethat discharges a driving pressure from the driving pressure introduction path; and a driving pressure introduction paththat couples the driving pressure introduction pathand the driving pressure introduction pathvia the automatic valveand the automatic valve

Valve and fluid supply line

Provided is a fluid control device that can have a small size, while a member for detecting abnormality of the fluid control device is incorporated. In addition, a result of detecting an abnormality of the fluid control device is made easily recognizable from the outside. A fluid control deviceincludes an information processing moduleprovided in the device, a valve bodyhaving a flow path, an actuator bodyfixed to the valve body, a hollow casingthat is fixed to the actuator bodyand has a side surface on which a through holeis formed, a pistonthat is provided in the actuator bodyand in which a driving pressure introduction paththat communicates with a driving pressure introduction chamber Sis formed, and an introduction pipethrough which driving pressure is introduced, the introduction pipehaving one end inserted to the driving pressure introduction pathand another end leading to an outside through the through holeof the casing

Fluid control device

A fluid control apparatus includes a gas line unit detachably attached to a frame. The gas line unit includes a line support member to which a fluid control device is attached. The frame includes: a first horizontal frame member; and a second horizontal frame member located below the first horizontal frame member. The first horizontal frame member includes: a hooking member extending in a left-right direction; and a lower portion which is located below the hooking member and in which a plurality of first grooves that are open to front are formed. The line support member includes: a device placement portion; and a pair of side plate portions protruding rearward from right and left edges of the device placement portion. Each of the side plate portions includes: a base portion located below the hooking member; and an upper portion located above the base portion and behind the hooking member.

Fluid control apparatus and method for attaching and detaching gas line section

A fluid controller heating apparatus includes a cylindrical heater unit that surrounds a portion of an opening-and-closing valve to be heated, and a heat insulation jacket that surrounds the heater unit. The heater unit includes a pair of heat-transfer members to which plate-shaped heaters are fixed, respectively. The heat-transfer members are mounted so as to hold the opening-and-closing valve therebetween from both sides and are capable of being coupled to each other with a screw member. The heat insulation jacket is a cylindrical integrated product.

Growing community of inventors

Osaka, Japan

Masahiko Ochiishi